US 5,962,937 AGranted

X-Y table for moving loads in a highly exact and dynamic manner

OwnerNicolas Wavreinventor

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Abstract

This X-Y table can move a load (CH) along perpendicular active directions (X, Y). It includes a base (1), a carriage (4) for the load (CH) mounted so as to move on the base along the active directions (X; Y), in particular via sliding means (3, 4) for each of said directions, two linear motors (B, C) which each include a stator (5) and a moving element (6) coupled to the carriage (4). Coils and magnets are respectively embedded in the moving elements and in the stators for applying driving forces to the carriage (4) along the active direction of the motor concerned (B, C), while allowing the moving element mobility in the other active direction with respect to said stator element. According to the invention, the length of the permanent magnets of the stator (5) of each of the two motors is greater than the length of the coils of the corresponding moving element along the direction perpendicular to the active direction of the motor concerned in the X-Y displacement plane, the difference between these two lengths being substantially equal to or greater than the travel of the moving part of the X-Y table along said perpendicular direction.

Claims13

Dependent claims

AN X-Y table intended to move a load, such as a tool, along two mutually perpendicular active directions, said table including:

a base
A carriage adapted to receive said load and mounted so as to move on the base along said directions;
and
at least two electric linear motors arranged for driving said carriage respectively along said two active directions, each of the two motors including a stator provided with permanent magnets and a moving part provided with at least one excitation coil and mechanically coupled to said carriage, said permanent magnets and said excitation coil being arranged so that, when said excitation coil is supplied, their magnetic coupling generates a driving force along the active direction of the given motor, said moving part being capable of being moved along each of the two active directions
the dimension of said at least one excitation coil of either of the two motors, along the active direction of the other of said two motors, being smaller than the corresponding dimension of said permanent magnets of said motor, the difference between these two dimensions being substantially equal to or greater than the travel of the moving element of the motor concerned along the active direction of the other of said two motors.

2 more elements

Dependencies are inferred from the claim text.