Single crystal wafers and a method of preparation thereof
AssigneeAnerkan Xtal Technology, Inc
InventorsGary Shen-Cheng Young, Shan-Xiang Zhang
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Abstract
Improved commercial single crystal wafers (250), as shipped to end users form a full circle, and comprise a "stress concentration notch" (172) which accurately defines a desired cleavage plane. The stress concentration notch is introduced into the wafers in bulk by means of a properly oriented cut along the length of a single crystal ingot, after machining the ingot to the desired end product diameter, and prior to sawing the ingot into slices. The stress concentration notch uniquely defines the first and second faces of the wafer.
Claims1
The method of manufacture of improved single crystal wafers with a stress concentration notch comprising the following steps:
- (1) Machine ingot (150) to a perfect cylinder at near the desired end product diameter;
- (2) Determine a selected set of cleavage planes (161) of the ingot;
- (3) Make a cut (171), aligned with a determined plane (161), along the length of the ingot;
- (4) Slice the ingot into wafers (250):
- (5) As required, grind the edges of the wafers to the finished diameter;
- (6) Bevel the edges of the wafers;
- (7) Polish the wafers;
- (8) Clean wafers;
- (9) Package wafers.
Dependencies are inferred from the claim text.