Contact regions for narrow trenches in semiconductor devices and method
AssigneeHarris Corporation
InventorsJames D. Beasom, Dustin A. Woodbury
Life of this patent
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Abstract
A contact region for a trench in a semiconductor device and a method for electrically contacting the conductive material in a trench that is too narrow for conventional electrical contacts may include a contact region in which the trench is divided into two or more trench sections, each section having the same narrow width as the undivided trench. The two or more trench sections are separated by one or more islands that are isolated from the semiconductor device. An aperture through the material above the contact region provides access for electrically contacting the conductive material in the trench sections.
Claims13
A trench contact region in a semiconductor device in which electrical contact is to be made with conductive material in a trench of generally uniform width that separates portions of the semiconductor device, said trench contact region comprising:
- an island surrounded on its sides by a first section of trench;
- and
- a terminal for electrically contacting the conductive material in said first section of trench without contacting portions of the semiconductor device outside said first section of said trench.
A trench contact region for contacting a conductive material in a trench in a semiconductor device, the trench separating portions of the semiconductor first device and having a first width that is narrower than needed to electrically contact a conductive material in the trench plus an alignment tolerance, said trench contact region comprising at least two spaced apart trench sections separated by at least one island that is isolated from the semiconductor device, each of said trench sections having a width not substantially more than said first width.
A trench filled with conductive material for separating portions of a semiconductor device, said trench comprising:
- a first portion having a first width;
- a contact portion having a second width wider than said first width that is connected to said first portion, said contact portion providing access for contacting the conductive material in the trench without contacting the portions of the device separated by said trench,
- said contact portion comprising an island that is surrounded on its sides by a second portion of said trench that is narrower than needed to electrically contact the conductive material in said second portion.
Dependencies are inferred from the claim text.