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AssigneeNorthwestern University
InventorsRobert Pang Heng Chang, Jeffrey Michael Lauerhaas, Tobin Jay Marks, Udo C. Pernisz
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A method of making silicon oxide nanoparticles possessing photoluminescence in the blue and green part of the visible spectrum when irradiated with ultraviolet (UV) light. The silicon oxide nanoparticles are formed in a chamber containing a direct current (dc) electric arc that generates a plasma in an oxygen-containing atmosphere. In the chamber, silicon is used as the anode, and the cathode can be copper (Cu) or tungsten (W). The use of silicon as an electrode is enabled by doping silicon with boron to a sufficiently high electronic conductivity, and orienting the two electrodes vertically in the chamber, so that the silicon anode is lowermost to contain silicon in the anode when it melts and vaporizes in the arc. The silicon oxide nanoparticles are collected on a cold plate adjacent to the arc.
Silicon oxide nanoparticles made by a method comprising generating a direct current electric arc between an anode comprised of silicon and a metal cathode in a chamber containing oxygen, subjecting the silicon of the anode to the plasma generated by the electric arc to vaporize silicon within the chamber, allowing silicon oxide nanoparticles to form in the chamber, quenching the silicon oxide nanoparticles on a surface within the chamber positioned adjacent the silicon anode, and collecting the silicon oxide nanoparticles from the surface.
Silicon oxide nanoparticles comprising an amorphous network of SiO.sub.x having silicon nanoparticles embedded in the amorphous SiO.sub.x network where x is less than or equal to two, made by a method comprising generating a direct current electric arc between an anode comprised of silicon and a metal cathode in a chamber containing oxygen, subjecting the silicon of the anode to the plasma generated by the electric arc to vaporize silicon within the chamber, allowing silicon oxide nanoparticles to form in the chamber, quenching the silicon oxide nanoparticles on a surface within the chamber positioned adjacent the silicon anode, and collecting the silicon oxide nanoparticles from the surface.
Dependencies are inferred from the claim text.