Method of manufacturing a passage tube for passing plasma producing gas
AssigneeNGK Insulators, Ltd.
InventorsToshio Ohashi, Michio Asai
Life of this patent
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Abstract
A passage tube including a ceramic tube body through which plasma producing gas passes and is irradiated from outside the ceramic tube body with ultraviolet rays, and a ceramic flange member joined to an outer peripheral surface of the ceramic tube body, is manufactured by forming calcined bodies for the passage tube body and flange member, machining the calcined body for the tube body so as to form a first portion and a second portion having an outer diameter larger than that of the first portion, joining the calcined body for the flange member to a stepped region between the first portion and the second portion and sintering them.
Claims5
A method of manufacturing a passage tube that includes a ceramic tube body through which plasma producing gas passes and is irradiated from outside the ceramic tube body with ultraviolet rays, and a ceramic flange member joined to an outer peripheral surface of the ceramic tube body, said method comprising the steps of:
- calcining a shaped ceramic tube body to obtain a calcined ceramic tube body;
- machining an outer peripheral surface of the calcined ceramic tube body to form a first portion and a second portion having an outer diameter larger than that of the first portion with a stepped region defined between the outer peripheral surface of the first portion and the outer peripheral surface of the second portion;
- joining a calcined body for the ceramic flange member to the stepped region of the calcined ceramic tube body to obtain an assembled body;
- and
- sintering the assembled body.
Dependencies are inferred from the claim text.