Treating substrates by producing and controlling a cryogenic aerosol
AssigneeFSI International, Inc.
InventorsJohn C. Patrin, John M. Heitzinger
Life of this patent
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Abstract
A substrate may be treated by impinging the substrate with a cryogenic aerosol spray wherein the cryogenic aerosol spray is formed by expanding a pressurized liquid or liquid/gaseous stream of one or more cryogens through a nozzle at a given distance from the substrate into a process chamber with a pressure of about 1.6.times.10.sup.4 Pascal or less so as to form at least substantially solid aerosol particles of said one or more cryogens downstream from the nozzle by the cooling resulting from the expansion and/or evaporation to form an at least substantially solid particle containing aerosol.
Claims11
A method for treating a substrate by impinging the substrate with a cryogenic aerosel spray wherein said cryogenic aerosol spray is formed by
- forming a first aerosol spray comprising liquid particles and gas bubbles by expanding a pressurize liquid stream or liquid/gasous stream of one or more cryogens at a first pressure through a nozzle into a process chamber having a pressure of about 1.6.times.10.sup.4 Pascal or less;
- and
- effervescent flashing said first aerosol spray so as to form a cryogenic aerosol spray of at least substantially solid aerosol particle downstream from the nozzle, wherein said effervescent flashing promotes growth of said gas bubbles in said first aerosol spray and said gas bubbles break up said liquid particles to said substantially solid aerosol particles having a decreased particle size.
Dependencies are inferred from the claim text.