Back to results
US 5,961,728 AGranted
Method and apparatus for cleaning a test probe
AssigneeIntel Corporation
InventorsDavid Kerry Kiser, Robert J. Hyatt
Life of this patent
Estimating the term…
Abstract
A method and apparatus for cleaning a test probe of a semiconductor probe card. In one embodiment, the method of cleaning includes the steps of placing the test probes in contact with a textured cleaning surface and providing a vibrational movement to the cleaning surface.
Claims4
A method for cleaning a test probe, said method comprising:
- a) placing said test probe in contact with a cleaning surface that is independent of a surface to be tested by said test probe;
- and,
- b) providing a lateral vibrational movement to said cleaning surface for cleaning said test probe.
An apparatus for cleaning a test probe comprising:
- a testing apparatus including a test probe;
- a cleaning surface that is independent of a surface to be tested by said test probe;
- and,
- means for providing a lateral vibrational movement to said cleaning surface when said test probe is placed in contact with said cleaning surface, said lateral vibrational movement for cleaning said test probe.
1 more element
Dependencies are inferred from the claim text.