Deposited film forming apparatus and electrode for use in it
AssigneeCanon Kabushiki Kaisha
InventorTatsuyuki Aoike
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Abstract
The deposited film forming apparatus of the present invention capable of forming a deposited film having a small number of structural defects and a light-receiving member for electrophotography for forming a light-receiving member for electrophotography having excellent image characteristics, which comprises means for supplying a source gas into a reaction vessel capable of reducing a pressure in which said substrate is arranged, and high-frequency power supply means for supplying a high-frequency power into said reaction vessel in which said substrate is arranged, the source gas being decomposed by the high-frequency power to be able to form a deposited film on the substrate, wherein a supply portion of said high-frequency power supply means is constituted by a plurality of members.
Claims47
A deposited film forming apparatus comprising a reaction vessel which can hold a substrate therein and have a reduced internal pressure, means for supplying a source gas into said reaction vessel, and high-frequency power supply means including a high frequency power supply portion for supplying a high-frequency power to decompose the source gas in said reaction vessel, wherein said high-frequency power supply portion comprises a conductive member serving as a base member and a ceramics material covering the surface of the conductive member, wherein a surface of said high frequency portion is in said reaction vessel.
A deposited film forming apparatus comprising:
- a reaction vessel which can hold a substrate therein and have a reduced internal pressure;
- means for supplying source gas into said reaction vessel;
- and
- high-frequency power supply means including a high frequency power supply portion for supplying into said reaction vessel a high frequency power to decompose the source gas,
- wherein said high frequency power supply portion comprises a conductive central conductor, an insulating member covering said conductive central conductor and an annular conductor surrounding said conductive central conductor and insulated from said central conductor by said insulating member.
An electrode for high frequency power supply for use in a vacuum apparatus capable of forming a deposition film on a substrate by decomposing a source gas introduced into a reaction vessel by means of supplying a high frequency power to said source gas, wherein
- said electrode comprises a matrix formed of a conductive material and an insulating material covering said conductive material, and said electrode is arranged in said reaction vessel.
Dependencies are inferred from the claim text.