Synthesis of phosphorus-doped diamond
AssigneeNational Institute for Research in Inorganic Materials
InventorsMutsukazu Kamo, Satoshi Koizumi, Hiroyuki Ozaki
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Abstract
A synthesis of phosphorus-doped diamond by a microwave plasma method using a volatile hydrocarbon and hydrogen mixed therewith, as a reaction gas, wherein phosphorus is used as a dopant, and hydrogen bonded to the phosphorus is dissociated so that the phosphorus is introduced into diamond as an impurity without being bonded to hydrogen.
Claims9
A method of synthesizing phosphorus-doped diamond comprising subjecting a reaction gas of hydrogen, volatile hydrocarbon and a phosphorus source to a microwave plasma, under conditions of pressure, temperature, ratio of carbon in the volatile hydrocarbon to hydrogen in said reaction gas, and ratio of phosphorus to carbon in said reaction gas such that hydrogen bonded to phosphorus is disassociated and whereby phosphorus is introduced into diamond as an impurity without being bonded to hydrogen.
Dependencies are inferred from the claim text.