Method for treating silane-containing gas
AssigneeShin-Etsu Chemical Col, Ltd.
InventorsMasayuki Hasegawa, Kazuo Ogiwara, Hiroyuki Kobayashi, Yukinori Satoh, Yoshihiro Shirata, Masaaki Furuya
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Abstract
A silane-containing gas is treated by contacting it with a liquid containing silanes or disilanes which are higher boiling than the silanes in the silane-containing gas, thereby easily removing or reducing the amount of silanes in the gas and enabling the recovery of these silanes.
Claims13
A method for treating silane-containing gas, comprising the step of contacting a silane-containing gas with a liquid containing silanes or disilanes which are higher boiling than the silanes in said silane-containing gas, for removing or reducing the amount of silanes in said silane-containing gas.
Dependencies are inferred from the claim text.