Laser irradiation apparatus
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Koichiro Tanaka, Naoto Kusumoto
Life of this patent
Estimating the term…
Abstract
An apparatus for irradiating an irradiation surface with a laser light having a linear or rectangular shape. A homogenizer operates on the principle that variations in the light intensity profile of an original beam as emitted from a laser device are dispersed by passing the original beam through two multi-cylindrical lenses. The directions of the respective multi-cylindrical lenses are set so as not to be parallel with the beam movement direction. Thus, an uniformity of annealing by irradiating with a laser light is improved.
Claims12
A laser irradiation apparatus for irradiating with a laser light having a linear or rectangular shape, said apparatus comprising:
- a homogenizer including at least one multi-cylindrical lens;
- a plurality of cylindrical lenses in said multi-cylindrical lens,
- wherein a direction of said multi-cylindrical lens is not parallel with a movement direction of said laser light.
A laser irradiation apparatus for irradiating with a laser light having a linear shape, said apparatus comprising:
- a homogenizer including at least one multi-cylindrical lens;
- a plurality of cylindrical lenses in said multi-cylindrical lens,
- wherein a direction of said multi-cylindrical lens is not perpendicular to a longitudinal direction of said laser light.
Dependencies are inferred from the claim text.