Tunable-trimmable micro electro mechanical system (MEMS) capacitor

A tunable Micro Electro Mechanical System (MEMS) capacitor, comprising:

• a substrate;
• a control capacitor on said substrate, said control capacitor having a pair of opposing plates, at least one of said plates being suspended so that it moves in response to an electrostatic force produced by a control voltage applied across said control capacitor;
• a signal capacitor on said substrate that responds to a signal voltage, said signal capacitor having a pair of opposing plates, at least one of said plates being suspended so that it can move;
• and
• a mechanical coupler suspended above said substrate that slaves the motion of said signal capacitor's movable plate to the motion of said control capacitor's movable plate to tune the capacitance of said signal capacitor, wherein the electrostatic forces exerted on the control and signal capacitors' movable plates are proportional to their respective overlapping surface areas A.sub.C and A.sub.S, said signal capacitor's surface area A.sub.S being smaller than said control capacitor's surface area A.sub.C so that the electrostatic force exerted on the signal capacitor in response to the signal voltage is smaller than it would be were the signal and control capacitors integrated into a single capacitor that responded to both said control and signal voltages, said reduced electrostatic force reducing the deflection of said signal capacitor's movable plate in response to the signal voltage and thus reducing the distortion of its capacitance.

A tunable Micro Electro Mechanical System (MEMS) capacitor, comprising:

• a substrate;
• a control capacitor on said substrate, said control capacitor having a pair of opposing plates, at least one of said plates being suspended so that it moves in response to an electrostatic force produced by a control voltage applied across said control capacitor;
• a signal capacitor on said substrate that responds to a signal voltage, said signal capacitor having a pair of opposing plates, at least one of said plates being suspended so that it can move;
• and
• a mechanical coupler suspended above said substrate that slaves the motion of said signal capacitor's movable plate to the motion of said control capacitor's movable plate to tune the capacitance of said signal capacitor, wherein said substrate is a Silicon-On-Insulator (SOI) substrate comprising a silicon insulator layer on which said MEMS capacitor is formed, a silicon dioxide layer for releasing the MEMS capacitor's moveable parts from said insulator layer, and a top silicon layer in which said control capacitor is defined, said mechanical coupler being formed in a deposition layer that is less conductive than said top silicon to electrically isolate said control and signal capacitors.

A tunable Micro Electro Mechanical System (MEMS) capacitor, comprising:

• a substrate;
• a control capacitor on said substrate, said control capacitor having a pair of opposing plates, at least one of said plates being suspended so that it moves in response to an electrostatic force produced by a control voltage applied across said control capacitor;
• a signal capacitor on said substrate that responds to a signal voltage, said signal capacitor having a pair of opposing plates, at least one of said plates being suspended so that it can move;
• and
• a mechanical coupler suspended above said substrate that slaves the motion of said signal capacitor's movable plate to the motion of said control capacitor's movable plate to tune the capacitance of said signal capacitor, wherein said substrate is a Silicon-On-Insulator (SOI) substrate comprising a silicon insulator layer having a cavity etched therethrough, a patterned silicon dioxide layer, and a top silicon layer in which said control capacitor, mechanical coupler, and signal capacitor are defined so that they are anchored to said insulator layer and suspended over the cavity, said control and signal capacitors further comprising a metal deposition layer that increases their conductivity relative to the mechanical coupler so that said control and signal capacitors are electrically isolated.

A tunable Micro Electro Mechanical System (MEMS) capacitor, comprising:

• a substrate;
• a control capacitor on said substrate, said control capacitor having a pair of opposing plates, at least one of said plates being suspended so that it moves in response to an electrostatic force produced by a control voltage applied across said control capacitor;
• a signal capacitor on said substrate that responds to a signal voltage, said signal capacitor having a pair of opposing plates, at least one of said plates being suspended so that it can move;
• and
• a mechanical coupler suspended above said substrate that slaves the motion of said signal capacitor's movable plate to the motion of said control capacitor's movable plate to tune the capacitance of said signal capacitor, wherein said substrate is a Silicon-On-Insulator (SOI) substrate comprising a silicon insulator layer having a cavity etched therethrough, a silicon dioxide layer in which said mechanical coupler is patterned, and a top silicon layer in which said control capacitor and signal capacitor are defined so that they are anchored to said insulator layer and suspended over the cavity, said control and signal capacitors further comprising a metal deposition layer that increases their conductivity relative to the mechanical coupler so that said control and signal capacitors are electrically isolated.

A tunable Micro Electro Mechanical System (MEMS) capacitor, comprising:

• a substrate;
• a flexure structure that is anchored to and suspended above said substrate so that it flexes along a direction of motion;
• a control capacitor on said substrate, said control capacitor having a pair of opposing plates, at least one of said plates being connected to said flexure structure so that it is movable in response to an electrostatic force produced by a control voltage across said control capacitor, said force being proportional to the plates' overlapping surface area A.sub.C ;
• a signal capacitor on said substrate that receives a signal voltage, said signal capacitor having a pair of opposing plates, at least one of said plates being suspended so that it is movable;
• and
• a mechanical coupler that slaves the motion of said signal capacitor's movable plate to the motion of said control capacitor's movable plate to set the capacitance of said signal capacitor and electrically isolates the signal capacitor from the control capacitor,
• said flexure structure exhibiting a small spring constant in the direction of motion to allow a wide range of motion for tuning the signal capacitor, and
• said signal capacitor's surface area A.sub.S being smaller then the control capacitor's surface area A.sub.C and the spring constant of said isolator in the direction of an electrostatic force produced by said signal voltage being large to reduce the sensitivity of said signal capacitor's moveable plate to the signal voltage.

A tunable Micro Electro Mechanical System (MEMS) capacitor, comprising:

• a Silicon-On-Insulator (SOI) substrate comprising a silicon insulator layer having a cavity etched therethrough, a patterned silicon dioxide layer, and a top silicon layer in which are patterned:
• a control capacitor comprising:
• a first contact on said substrate adjacent said cavity;
• a first plurality of fingers that extend from said first contact over said cavity;
• second and third contacts on said substrate on opposite sides of said cavity;
• a first beam that is connected between said second and third contacts and suspended over said cavity;
• a second plurality of fingers that extend from said first beam so that they are interdigitated with the first plurality of fingers that extend from said first contact, said first beam being flexible along a direction of motion parallel to its fingers so that it moves in response to an electrostatic force produced by a control voltage applied across said control capacitor;
• a signal capacitor that receives a signal voltage, comprising:
• a fourth contact on said substrate adjacent said cavity;
• a third plurality of fingers that extend from said fourth contact over said cavity;
• fifth and sixth contacts on said substrate on opposite sides of said cavity;
• a second beam that is connected between said fifth and sixth contacts and suspended over said cavity;
• a fourth plurality of fingers that extend from said second beam so that they are interdigitated with the third plurality of fingers that extend from said fourth contact;
• a mechanical coupler suspended above the cavity in said substrate between said first and second beams that slaves the motion of said signal capacitor's second beam to the motion of said control capacitor's first beam to tune the capacitance of said signal capacitor;
• and
• a deposition layer on said fingers that increases the conductivity of the control and signal capacitors with respect to said mechanical coupler so that they are electrically isolated.

A trimmable Micro Electro Mechanical System (MEMS) capacitor, comprising:

• a substrate;
• a flexure structure that is anchored to and suspended above said substrate so that it flexes along a direction of motion;
• a signal capacitor on said substrate that receives a signal voltage, said signal capacitor having a pair of opposing plates, at least one of said plates being connected to said flexure structure so that it can move in response to a control voltage to set the capacitance of said signal capacitor;
• a plurality of teeth that are coupled to and move with said moving plate;
• and
• an electrostatic actuator on said substrate, said actuator responding to a switch voltage to disengage a stopper and allow said control voltage to trim the signal capacitor's capacitance and then reengage said stopper in said teeth such that the movable plate is fixed.

A noise compensated Micro Electro Mechanical System (MEMS) capacitor, comprising:

• a substrate;
• a flexure structure that is anchored to and suspended above said substrate so that it flexes along a direction of motion;
• a signal capacitor on said substrate that receives a signal voltage, said signal capacitor having a pair of opposing plates, at least one of said plates being connected to said flexure structure so that it can move in response to a control voltage to set the capacitance of said signal capacitor;
• a noise sensor for detecting extraneous mechanical motion that would deflect the signal capacitor's moveable plate thereby distorting its capacitance;
• and
• a signal conditioner that feeds back the detected motion to the signal capacitor to compensate for the extraneous mechanic motion.