Microelectromechanical reciprocating-tooth indexing apparatus
AssigneeSandia Corporation
InventorJames J. Allen
Life of this patent
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Abstract
An indexing apparatus is disclosed that can be used to rotate a gear or move a rack in a precise, controllable manner. The indexing apparatus, based on a reciprocating shuttle driven by one or more actuators, can be formed either as a micromachine, or as a millimachine. The reciprocating shuttle of the indexing apparatus can be driven by a thermal, electrostatic or electromagnetic actuator, with one or more wedge-shaped drive teeth of the shuttle being moveable to engage and slide against indexing teeth on the gear or rack, thereby moving the gear or rack. The indexing apparatus can be formed by either surface micromachining processes or LIGA processes, depending on the size of the apparatus that is to be formed.
Claims44
An indexing apparatus comprising:
- (a) at least one actuator formed on a silicon substrate and producing reciprocating motion;
- (b) a shuttle connected to each actuator and having a drive tooth at one end thereof;
- and
- (c) a moveable member having a plurality of indexing teeth which are engageable by the drive tooth of the shuttle to provide for motion of the moveable member.
An indexing apparatus comprising:
- (a) a moveable member formed of polycrystalline silicon and having a plurality of indexing teeth;
- and
- (b) a reciprocating shuttle formed of polycrystalline silicon and having a pair of drive teeth that alternately engage the indexing teeth of the moveable member to produce motion thereof.
An indexing apparatus comprising:
- (a) an electrically-activated actuator to produce reciprocating motion;
- (b) an elongate shuttle connected to the actuator and having drive teeth at opposite ends thereof;
- and
- (c) a moveable member having a plurality of indexing teeth which are engageable by the drive teeth of the shuttle to urge the moveable member along a path.
A microelectromechanical (MEM) indexing apparatus comprising:
- (a) an electrostatic actuator formed on a substrate and producing reciprocating motion;
- (b) a shuttle located on the substrate and connected to the actuator, the shuttle having at least one drive tooth at one end thereof;
- and
- (c) a moveable member located on the substrate and having a plurality of indexing teeth which are engageable by the drive tooth of the shuttle to urge the moveable member along a path.
Dependencies are inferred from the claim text.