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AssigneeTDK Corporation
InventorsManabu Ohta, Kiyoshi Noguchi, Masashi Sano, Satoru Araki, Taro Oike
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According to the present invention, a magnetic multilayered film includes an oxide antiferromagnetic layer, a pinned ferromagnetic layer which is pinned by the oxide antiferromagnetic layer, a non-magnetic metal layer and a free ferromagnetic layer which are stacked on a substrate in order. A surface roughness Ra of the oxide antiferromagnetic layer at the side of the pinned ferromagnetic layer is set to no greater than 0.6 nm, and a crystal grain size D of the oxide antiferromagnetic layer is set to a value in the range of 10 to 40 nm. Thus, the magnetic multilayered film has the large exchange-coupling magnetic field and MR ratio and MR sensitivity. The magnetic multilayered film may be applied to a magnetoresistance effect element which may also applied to a magnetoresistance device, such as, a magnetoresistance effect type head. The magnetoresistance effect element having such a magnetic multilayered film is capable of obtaining high outputs. The magnetoresistance effect type head having such a magnetoresistance effect element which is excellent in current efficiency and capable of detecting signals magnetically recorded in high density, particularly in ultrahigh density exceeding 3 Gbit/inch.sup.2 and further obtaining large outputs.
A magnetic multilayered film comprising an oxide antiferromagnetic layer, a pinned ferromagnetic layer which is pinned by said oxide antiferromagnetic layer, a non-magnetic metal layer and a free ferromagnetic layer which are stacked on a substrate in order,
A magnetoresistance effect element comprising a magnetic multilayered film and electrode portions provided at both ends of said magnetic multilayered film,
A magnetoresistance device comprising a magnetic multilayered film, conductive films and electrode portions, said conductive films electrically connected to said magnetic multilayered film via said electrode portions, respectively,
Dependencies are inferred from the claim text.