Solid-state chemical sensor
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsJoerg-Uwe Meyer, Andrea Haeusler
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Abstract
The invention pertains to a solid-state chemical sensor with a substrate support. On one side of the support is mounted a heating element with branch circuit connections. On the other side interdigital electrodes are arranged and thereon a carbon dioxide-sensitive material, which comprises CuO and TiO.sub.3, as well as additional metal oxides, in the form of a thick film of approximately 20-200 .mu.m.
Claims15
A semiconductive solid-state chemical sensor comprising a ceramic carrier having on one side a heating element with branch circuit connections and on the other side interdigitated electrodes and thereupon a gas sensitive material disposed as a thick film,
- wherein the gas sensitive material comprises CuO, Ba--TiO.sub.3, and Cu.sub.x Ce.sub.y O.sub.z in sintered form as a catalyst or adhesion compound, wherein x, y, and z are in the range of approximately 1-5, and x, y and z do not have to be integers.
A method for preparing a semiconductive solid-state sensor, comprising:
- providing a solid substrate,
- attaching on one side of the substrate a heating element,
- attaching on another side of the substrate interdigitated electrodes, and
- operably disposing upon the electrodes a gas sensitive material comprising CuO, Ba--TiO.sub.3, and Cu.sub.x Ce.sub.y O.sub.z in sintered form as a catalyst or adhesion compound, wherein x, y, and z are in the range of approximately 1-5, and x, y and z do not have to be integers.
A semiconductive solid-state chemical sensor, comprising a ceramic carrier having a heating element with branch circuit connections on one side and interdigitated electrodes and a CO.sub.2 gas sensitive material on the other side, wherein conductivity is measured by measuring resistance as the CO.sub.2 concentration changes,
- wherein said CO.sub.2 gas sensitive material comprises CuO, BaTiO.sub.3, and Cu.sub.x Ce.sub.y O.sub.z, wherein x, y, and z are in the range of approximately 1-5, and x, y and z do not have to be integers, and
- wherein said CO.sub.2 gas sensitive material is sintered and has a film thickness of approximately 20 to 200 .mu.m.
Dependencies are inferred from the claim text.