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US 5,958,270 AGranted
Wire bonding wedge tool with electric heater
AssigneeLG Semicon Co., Ltd.
InventorJae Weon Cho
Life of this patent
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Abstract
In a wedge tool having a heating device, a metal rod having a heating line, a conductive wire or a thin film-type heating plate is disposed at a predetermined portion of the wedge tool, to which power is supplied through a power supply unit, respectively, in order to provide heat to the wedge tool in wire bonding process. By having such a construction, the wedge tool has the heating system for generating heat, so that a substantially preferable and remarkable bonding force can be obtained.
Claims10
A wedge tool comprising:
- an elongated body unit having two opposing ends;
- a first hole formed in a side portion of said elongated body unit of said wedge tool;
- a metal bar formed in the first hole;
- heating wires embedded in the metal bar formed in the first hole;
- a power supply unit coupled to the heating wires for supplying electric power;
- first and second protrusions at one of said ends;
- and
- a second hole formed through an edge portion of the first protrusion of the wedge tool and a bonding area formed on the second protrusion, wherein when enabled the metal bar provides heat to the bonding area, wherein when enabled the wedge tool further provides mechanical force, ultrasonic waves and said heat to the bonding area for bonding of the bonding material, and wherein said heat at the bonding area is approximately 200.degree. C. to 250.degree. C.
5 more elements
A bonding system comprising:
- a semiconductor package having an inner lead;
- a semiconductor chip having a pad;
- a bonding material;
- and
- a wedge tool, wherein the wedge tool comprises,
- an elongated body unit having two opposing ends,
- a first hole formed in a side portion of said elongated body unit of said wedge tool,
- a metal bar formed in the first hole,
- heating wires embedded in the metal bar formed in the first hole,
- a power supply unit coupled to the heating wires for supplying power,
- first and second protrusions at one of said ends, and
- a second hole formed through an edge portion of the first protrusion of the wedge tool and a bonding area formed on the second protrusion, wherein the bonding material passes through the second hole and over the bonding area, wherein when enabled the wedge tool provides heat to the bonding area, wherein said heat at the bonding area is substantially transferred to the bonding material and not substantially transferred to the pad and the inner lead, wherein said heat at the bonding area is approximately 200.degree. C. to 250.degree. C., wherein the bonding material is a conductive wire, and wherein the second hole limits movement of the conductive.
9 more elements
Dependencies are inferred from the claim text.