Polishing apparatus with support columns supporting multiple platform members
AssigneeSpeedfam Corporation
InventorsRobert L. Anderson, III, Michael Manseau, Janusz Aleksander Derza, John Edward Bussan
Life of this patent
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AssigneeSpeedfam Corporation
InventorsRobert L. Anderson, III, Michael Manseau, Janusz Aleksander Derza, John Edward Bussan
Estimating the term…
A polishing machine includes a platform assembly slidably mounted on three support columns. The platform assembly includes first and second platforms captively joined together so as to be slidably movable toward and away from each other. A lift plate is supported above the uppermost platform by a coil spring and an upper polish plate is suspended from the lift plate by a supporting element which passes through the platform assembly. Drive shafts are suspended from an overlying superstructure and engage the upper platform so as to selectively raise and lower the platform assembly and the upper polish plate. The spring allows adjustment of the pressure applied by the upper polish plate.
An apparatus for polishing a workpiece, comprising:
An apparatus for polishing a workpiece, comprising:
An apparatus for polishing a workpiece, comprising:
An apparatus for polishing a workpiece, comprising:
Dependencies are inferred from the claim text.