Epicycloidal brushing system
AssigneeInternational Business Machines Corporation
InventorsLuigi Bassi, Paolo Spinzi
Life of this patent
Estimating the term…
Abstract
A brushing system to be used in the manufacturing of electronic modules for removing unwanted particles from the substrate surface before the final encapsulation of the modules. The system provides an epicycloidal movement of the brush bristles on the substrate, which results in very effective in the removal of the particles. The system comprises a rotatable shaft with an eccentric bore. The hub of a rotatable brush can freely move inside the bore. When the shaft is rotated by a motor and the brush bristles are subject to friction, the brush describes an epicycloidal movement.
Claims11
A brushing system for removing unwanted particles from the surface of a semiconductor device, the system comprising:
- a rotatable shaft having a cylindric bore and connectable to a motor, the bore being radially displaced with respect to the axis of rotation of the shaft;
- and
- a rotatable brush for brushing the surface, the brush having a plurality of bristles and a cylindric hub extending into the bore of the shaft, the hub being free to rotate inside the bore and able to move axially inside the bore, the hub having substantially the same diameter of said bore;
- and
- elastic means for opposing axial movement of the hub, thereby causing the brush to exert pressure against the surface when in contact therewith,
- wherein movement of the brush describes a substantially epicycloidal curve on the surface in accordance with the pressure exerted against the surface, so that a change in the pressure causes a change in the epicycloidal curve.
Dependencies are inferred from the claim text.