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US 5,955,857 AGranted
Wafer conveyor system
AssigneeHyundai Electronics Industries Co., Ltd.
InventorsChang-Heon Kwon, Ki-Ho Lee, Hae-San Ryoo, Yong-Pyo Kim
Life of this patent
Estimating the term…
Abstract
A wafer conveyor system and controlling method therefor sends/receives a semiconductor wafer to/from a designated place includes a stocker for storing and delivering a package box with a plurality of wafers therein, a transferring path for connecting one stocker with another stocker, a carrier traveling along the transferring path for transporting the package box between the stockers, an automatic charging device placed to any one position of the transferring path for charging a battery loaded onto the carrier traveling along the transferring path when the battery is discharged, and a central control unit for controlling the driving of the stocker, transferring path, carrier and automatic charging device.
Claims44
A wafer conveyor system comprising:
- a stocker for storing and delivering a package box with a plurality of wafers therein;
- a transferring path for connecting one stocker with another stocker;
- a carrier traveling along said transferring path for transporting said package box between said stockers;
- an automatic charging device placed to any one position of said transferring path for charging a battery loaded onto said carrier traveling along said transferring path when said battery is discharged;
- and
- a central control unit for controlling the driving of said stocker, transferring path, carrier and automatic charging device, and
- wherein said stocker comprises:
- a storing section having a plurality of storage zones for storing the package boxes;
- a pivot arm unit for putting said package box in said storing section onto said carrier, and transporting said package box delivered by said carrier to the corresponding storage zone of said storing section;
- and
- a pivot arm lifter for transferring said pivot arm unit up-and-down and side-to-side, and
- wherein said pivot arm unit comprises:
- a fixing arm fixed to a moving holder of said pivot arm lifter;
- a first robot arm installed to said fixing arm;
- a first driving section for driving said first robot arm to be rotatable;
- a second robot arm installed to the other end of said first robot arm;
- a second driving section for driving said second robot arm;
- and
- a pickup arm installed to the other end of said second robot arm,
- whereby said first robot arm and second robot arm are independently driven by separate driving motors rotated in a speed ratio of 1:2 to allow a pickup arm driving shaft to conduct the linear motion toward the center of a first robot arm driving shaft, and a rotational ratio of a second robot arm driving shaft and said pickup arm driving shaft rotated with said second robot arm driving shaft is maintained by 2:1 to allow said pickup arm to conduct the linear motion.
17 more elements
A wafer conveyor system comprising:
- a stocker for storing and delivering a package box with a plurality of wafers therein;
- a transferring path for connecting one stocker with another stocker;
- a carrier traveling along said transferring path for transporting said package box between said stockers;
- an automatic charging device placed to any one position of said transferring path for charging a battery loaded onto said carrier traveling along said transferring path when said battery is discharged;
- and
- a central control unit for controlling the driving of said stocker, transferring path, carrier and automatic charging device, and
- wherein said stocker comprises:
- a storing section having a plurality of storage zones for storing the package boxes;
- a pivot arm unit for putting said package box in said storing section onto said carrier, and transporting said package box delivered by said carrier to the corresponding storage zone of said storing section;
- and
- a pivot arm lifter for transferring said pivot arm unit up-and-down and side-to-side, and
- wherein a joint portion of said first robot arm is constructed such that a driving shaft connecting portion of said first robot arm extends to be fitted with a bearing housing, a first driving shaft for rotating said first robot arm is fitted into an inner diameter of said bearing housing, and a bearing for supporting said first robot arm is installed to an outer circumference of said bearing housing while bearings for supporting said first driving shaft are installed to upper and lower ends of said inner diameter.
9 more elements
A wafer conveyor system comprising:
- a stocker for storing and delivering a package box with a plurality of wafers therein;
- a transferring path for connecting one stocker with another stocker;
- a carrier traveling along said transferring path for transporting said package box between said stockers;
- an automatic charging device placed to any one position of said transferring path for charging a battery loaded onto said carrier traveling along said transferring path when said battery is discharged;
- and
- a central control unit for controlling the driving of said stocker, transferring path, carrier and automatic charging device, and
- wherein said stocker comprises:
- a storing section having a plurality of storage zones for storing the package boxes;
- a pivot arm unit for putting said package box in said storing section onto said carrier, and transporting said package box delivered by said carrier to the corresponding storage zone of said storing section;
- and
- a pivot arm lifter for transferring said pivot arm unit up-and-down and side-to-side, and
- wherein said pivot arm lifter comprises:
- a main body frame erectly installed to be linearly movable along a pivot arm trans apparatus;
- a vertical feed member installed to be movable up and down to said main body frame by fixing said pivot arm unit;
- a motor for providing a motive power to said vertical feed member;
- power transmitting means for transmitting said motive power of said motor to said vertical feed member;
- a guide block installed to the interior of said main body frame for supporting and guiding the rotational moment of inertia of said pivot arm unit fixed to said vertical feed member and supporting the moment of inertia applied during the rotation of said pivot arm unit;
- a balance weight installed to be moved in the opposite direction to the advancing direction of said vertical feed member for decreasing the load exerting upon said motor when said vertical feed member ascends;
- and
- power decelerating means for decelerating the motive power of said motor to the proper speed of said vertical feed member.
17 more elements
A wafer conveyor system as claimed in claim 31, wherein said position control means comprises limit sensors for forcibly stopping said pivot arm in case of an abnormal driving, and a home sensor for determining an initial position.
A wafer conveyor system comprising:
- a stocker for storing and delivering a package box with a plurality of wafers therein;
- a transferring path for connecting one stocker with another stocker;
- a carrier traveling along said transferring path for transporting said package box between said stockers;
- an automatic charging device placed to any one position of said transferring path for charging a battery loaded onto said carrier traveling along said transferring path when said battery is discharged;
- and
- a central control unit for controlling the driving of said stocker, transferring path, carrier and automatic charging device, and
- wherein said transferring path comprises a main rail installed by connecting said stockers furnished to respective process lines, and a branch apparatus for transporting said carrier traveling along said main rail toward said stocker, and
- wherein said branch apparatus comprises:
- a first rail perpendicularly separated from said main rail to be moved;
- a second rail installed to be opposite to said first rail by maintaining a predetermined distance from said first rail;
- plates for supporting said first rail and second rail;
- guiders for guiding the movement of said plates;
- driving means for supplying a motive power to said plates;
- and
- a base for supporting said driving means and guiders.
12 more elements
A wafer conveyor system comprising:
- a stocker for storing and delivering a package box with a plurality of wafers therein;
- a transferring path for connecting one stocker with another stocker;
- a carrier traveling along said transferring path for transporting said package box between said stockers;
- an automatic charging device placed to any one position of said transferring path for charging a battery loaded onto said carrier traveling along said transferring path when said battery is discharged;
- and
- a central control unit for controlling the driving of said stocker, transferring path, carrier and automatic charging device, and
- wherein said carrier comprises:
- a driving section having driving means onto the front of a table loaded with said package box thereon;
- a charging section equipped with said battery for supplying electric power to said driving means at a rear portion thereof;
- and
- control means for controlling the driving of said driving means, and
- wherein said driving section comprises a main roller rotated by receiving said motive power from said driving means;
- and said charging section is installed with an auxiliary roller rotated in association with said main roller.
10 more elements
Dependencies are inferred from the claim text.