Coating for the structured production of conductors on the surface of electrically insulating substrates
AssigneeLpkf Laser & Electronics AG
InventorsJoerg Kickelhain, Bruno Vitt
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AssigneeLpkf Laser & Electronics AG
InventorsJoerg Kickelhain, Bruno Vitt
Estimating the term…
A coating for the structured production of conductors on the surface of electrically insulating substrates, in particular for producing sensor elements and printed circuit boards. The coating is formed from a doped tin oxide layer having the composition Sn.sub.1-(y+z) A.sub.y B.sub.z O.sub.2, in which A is Sb or F and B is In or Al. The relative proportions in the coating of the dopants antimony (or fluorine) and indium (or aluminum) are defined by the limits 0.02<y+z<0.11 and satisfy the condition 1.4<y/z<2.2. The coating can be structured by ablation using electromagnetic laser radiation in the wavelength range 157-1064 nm. The creates an economical means for high resolution and waste-free structuring of insulating channels in thin, electrically conductive layers having high chemical, mechanical and thermal resistance on glass or ceramic substrates.
An article of manufacture comprising an electrically insulating substrate having deposited thereon a doped tin oxide layer having the composition:
A method for producing a coated article comprising applying a layer of doped tin oxide by aerosol spray pyrolysis to an electrically insulating substrate at a surface temperature of 400.degree. C. to 600.degree. C., said layer having a thickness between 50 nm and 500 nm, and said doped tin oxide having a composition:
A method of producing a structured layer on a substrate, said method comprising
Dependencies are inferred from the claim text.