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US 5,951,820 AGranted
Method of purifying an organometallic compound
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHiromi Ohsaki, Kazuhiro Hirahara, Toshinobu Ishihara, Isao Kaneko
Life of this patent
Estimating the term…
Abstract
An organometallic compound represented by the general formula (I) ##STR1## or the general formula (II) R-M.sup.2 -R (II) is evaporated, and then passed through the inner tube of a heat exchanger to be precipitated. The heat exchanger is then heated to re-evaporate the organometallic compound, and the re-evaporated organometallic compound is then precipitated in a filling container which is connected to said heat exchanger and cooled down to a prescribed temperature to fill the container.
Claims6
A method of purifying an organometallic compound, comprising the steps of:
- (a) evaporating an organometallic compound selected from a compound represented by the general formula (I) ##STR4## and a compound represented by the general formula (II)
- R-M.sup.2 -R (II)
- wherein R denotes alkyl groups having a carbon number of 1-3, M.sup.1 denotes a trivalent metal atom, and M.sup.2 denotes a divalent metal atom, said organometallic compound with impurities being contained in a first container;
- (b) precipitating said organometallic compound by passing said organometallic compound through an inner tube of a first heat exchanger which has a double-tube structure having an inner tube and an outer tube wherein the outer tube is cooled down to the melting point of said organometallic compound or lower;
- (c) re-evaporating said organometallic compound precipitated on said inner tube of the first heat exchanger by heating said outer tube of the first heat exchanger;
- (d) re-precipitating said evaporated organometallic compound after said re-evaporating step in the inner tube of said first heat exchanger by passing said organometallic compound through the inner tube of a second heat exchanger which has the same structure as that of said first heat exchanger to cool down to the melting point of said organometallic compound;
- (e) re-evaporating said organometallic compound re-precipitated on said inner tube of said second heat exchanger by heating said outer tube of said second heat exchanger;
- (f) repeating said re-precipitating step (d) and said re-evaporating step (e) in the inner tube of additionally connected third or more heat exchangers for several times as necessary;
- and
- (g) re-precipitating said re-evaporated organometallic compound in a filling second container which is in fluid communication with said heat exchangers and cooled down to a prescribed temperature to fill the filling second container,
- wherein the outer tube of each of said heat exchangers is cooled down to a temperature of from -70.degree. C. to -10.degree. C., and heated up to a temperature of from 20.degree. C. to 100.degree. C.
8 more elements
A method of purifying an organometallic compound, comprising the steps of:
- (a) evaporating an organometallic compound selected from a compound represented by the general formula (I) ##STR5## and a compound represented by the general formula (II)
- R-M.sup.2 -R (II)
- wherein R denotes alkyl groups having a carbon number of 1-3, M.sup.1 denotes a trivalent metal atom, and M.sup.2 denotes a divalent metal atom, said organometallic compound with impurities being contained in a first container;
- (b) precipitating said organometallic compound by passing said organometallic compound through an inner tube of a first heat exchanger which has a double-tube structure having an inner tube and an outer tube wherein the outer tube is cooled down to the melting point of said organometallic compound or lower;
- (c) re-evaporating said organometallic compound precipitated on said inner tube of the first heat exchanger by heating said outer tube of the first heat exchanger;
- (d) re-precipitating said evaporated organometallic compound after said re-evaporating step in the inner tube of said first heat exchanger by passing said organometallic compound through the inner tube of a second heat exchanger which has the same structure as that of said first heat exchanger to cool down to the melting point of said organometallic compound;
- (e) re-evaporating said organometallic compound re-precipitated on said inner tube of said second heat exchanger by heating said outer tube of said second heat exchanger;
- (f) repeating said re-precipitating step (d) and said re-evaporating step (e) in the inner tube of additionally connected third or more heat exchangers for several times as necessary;
- and
- (g) re-precipitating said re-evaporated organometallic compound in a filling second container which is in fluid communication with said heat exchangers and cooled down to fill the filling second container,
- wherein the method is carried out at a pressure of from 1.times.10.sup.-4 to 50 torr.
8 more elements
Dependencies are inferred from the claim text.