Device equipped with floating rigid microstructure elements
AssigneeCommissariat a l'Energie Atomique
InventorMichel Vilain
Life of this patent
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Abstract
A device having at least one element of a floating rigid microstructure element made of a structure layer(s) and a rigidity lining which increases its resistance to flexing and to torsion. The increased rigidity of the microstructure element allows the thickness and/or the width to be reduced, particularly of the structure layer(s) and hence allows an increase in the thermal resistance.
Claims7
A micro-mechanical device comprising a support substrate, a floating structure separated from the substrate and at least one suspension beam connecting the floating structure to the substrate, characterised in that the beam has lateral edges provided with rigidity linings extending along the beam and in planes approximately perpendicular to the beam.
Dependencies are inferred from the claim text.