Seed crystal holder
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsMakoto Iida, Eiichi Iino, Masanori Kimura, Shozo Muraoka
Life of this patent
Estimating the term…
Abstract
A seed crystal holder used in a crystal pulling apparatus operated in accordance with the Czochralski method. In the seed crystal holder, a heat-resistant cushioning material is provided between the surface of a seed crystal and the contact surface of claws of the holder or between a cutaway surface of the seed crystal and a contact surface of an insert of the holder. The heat-resistant cushioning material is selected from the group consisting of carbon fiber felt, glass fiber felt, metallic fiber felt, or selected from materials that cause plastic deformation such as Al.
Claims4
A seed crystal holder used in a crystal pulling apparatus operated in accordance with the Czochralski method, wherein a heat-resistant cushioning material is provided between a surface of a seed crystal and a contact surface of claws of the holder or between a cutaway surface of a seed crystal and a contact surface of an insert of the holder.
Dependencies are inferred from the claim text.