Wear-through detector for multilayered parts and methods of using same
AssigneeInternational Business Machines Corporation
InventorsJay Burnham, Harold G. Linde, Nicholas N. Mone, Jr., Ronald A. Warren
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Abstract
The present invention relates to wear-through detection in multilayered parts. This invention specifically encompasses, in one aspect, wear-through detection in semiconductor vacuum processing systems in which a wear indicator that will release a detectable constituent upon exposure to processing conditions is used inside the semiconductor vacuum processing tool. This invention permits real time detection of wear during operation of semiconductor vacuum processing equipment.
Claims18
A method of detecting thinning from wear in a multilayered structure, comprising:
- providing an apparatus for processing an electronic workpiece;
- providing said apparatus with an indicator layer comprised of a detectable constituent;
- exposing said indicator layer to an environment which may erode said indicator layer effective to release said detectable constituent;
- and
- wherein if said indicator layer is eroded, said detectable constituent is transported to a detector within said apparatus for processing capable of detecting presence of said constituent and signaling said presence.
A method of detecting wear of a structural part of a semiconductor vacuum processing tool apparatus, comprising:
- providing a semiconductor vacuum processing apparatus housing at least one structural component comprising, in this sequence, a substrate, a thinning indicator layer located on said substrate where said indicator layer comprises a detectable constituent, and, on said indicator layer, a top layer exposed to contact with processing species within said processing apparatus, said detectable constituent being a compound or heavy isotope;
- providing a detector for detecting particles of said detectable constituent;
- exposing said structural component to said processing species;
- detecting with said detector said constituent when released from said indicator layer by effect of said processing species once said top layer is eroded through exposing said indicator layer;
- and
- signaling detection of said indicator layer constituent.
Dependencies are inferred from the claim text.