Hybrid laser resonator with special line narrowing
AssigneeLambda Physik AG
InventorsSergei V. Govorkov, Uwe Stamm
Life of this patent
Estimating the term…
Loading patent…
AssigneeLambda Physik AG
InventorsSergei V. Govorkov, Uwe Stamm
Estimating the term…
A laser system having a resonant cavity that is stable in one axis so that a wavelength selector can be used for producing a narrow line output, and is unstable in an orthogonal axis for high energy extraction efficiency and for low output beam divergence. The resonant cavity terminates at one end with a cylindrical mirror and at the other end with a dispersive wavelength selector. A gain medium is disposed in the resonant cavity, and is excited by a power supply to generate a laser beam that oscillates in the resonant cavity. A portion of the laser beam is coupled out of the resonant cavity as an output laser beam. The cylindrical mirror has a cylindrical reflecting surface oriented to diverge the laser beam at a first azimuthal angle relative to an axis of the resonant cavity. The dispersive wavelength selector disperses the laser beam as a function of wavelength at a second azimuthal angle relative to the resonant cavity axis. The second azimuthal angle is orthogonal to the first azimuthal angle.
A hybrid resonator for a laser, comprising:
A laser system, comprising:
An excimer laser, comprising:
Dependencies are inferred from the claim text.