Method of forming a lift-off layer having controlled adhesion strength
AssigneeTexas Instruments Incorporated
InventorsArthur M. Wilson, Chi-Cheong Shen, Saroja Ramamurthi
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AssigneeTexas Instruments Incorporated
InventorsArthur M. Wilson, Chi-Cheong Shen, Saroja Ramamurthi
Estimating the term…
A method of fabricating an emitter plate 12 for use in a field emission device comprising the steps of providing an insulating substrate 18 and forming a first conductive layer 13 on the insulating substrate 18. This is followed by the steps of forming an insulating layer 20 on the first conductive layer 13 and forming a second conductive layer 22 on the insulating layer 20. Then, a plurality of apertures 34 are formed through the second conductive layer 22 and through the insulating layer 20. A lift-off layer 36 is then formed on the second conductive layer 22. The lift-off layer 36 is formed by a plating process wherein the plating bath has a pH between 2.25 and 4.5, and current densities of 1 to 2O mA/cm.sup.2. The method may further comprise depositing conductive material through the plurality of apertures 34 to form a microtip 14 in each of the plurality of apertures 34. The excess deposited conductive material 14' and the lift-off layer 36 are then removed from the second conductive layer 22.
A method of fabricating an emitter plate for use in a field emission display device, said method comprising the steps of:
A method of fabricating an emitter plate for use in a field emission display device, said method comprising the steps of:
A method of fabricating an emitter plate for use in a field emission display device, said method comprising the steps of:
Dependencies are inferred from the claim text.