Pickup chuck with an integral heat pipe
AssigneeIntel Corporation
InventorRam S. Viswanath
Life of this patent
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Abstract
An apparatus and method for controlling the temperature of a heat generating device. In one embodiment, a pickup chuck having a heat pipe is provided. The heat pipe includes a first end defining an evaporator portion and a second end defining a condenser portion. A thermally conductive member at the first end of the heat pipe is adapted to engage a surface of the heat generating device. Heat is transferred away from the heat generating device by engaging the thermally conductive member with a surface of the heat generating device.
Claims12
A pickup chuck for holding a heat generating device having a first surface, said pickup chuck comprising:
- a body;
- a heat pipe attached to said body, said heat pipe having a first end defining an evaporator portion, a second end defining a condenser portion, and a working fluid;
- a thermally conductive member at said first end making contact with said surface of said heat generating device;
- and
- a vacuum port for retaining said heat generating device in contact with said thermally conductive member.
The pickup chuck of claim 2 wherein said heat pipe is flexible.
A method for transferring heat from the surface of a heat generating device, said method comprising the steps of:
- positioning a bellows heat pipe having a thermally conductive member disposed at a first end of said bellows heat pipe adjacent to said heat generating device;
- and
- compressing said bellows heat pipe against said heat generating device such that said thermally conductive member is in intimate contact with said heat generating device;
- and,
- retaining said heat generating device in contact with said heat pipe by a vacuum port.
Dependencies are inferred from the claim text.