Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method
AssigneeLucent Technologies Inc.
InventorsJoseph Earl Ford, Keith Wayne Goossen, James Albert Walker
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Abstract
A micro-mechanical, anti-reflective, switched optical modular array that utilizes a continuous, uninterrupted modular membrane across an array of individual modulators. The individual modulators are positioned within an optical window of the device, the optical window being defined by a region of the membrane situated between an array of electrode pairs, where an individual pair of electrodes is used to control an individual one of the modulators. Alternative electrode shapes and fabrication methods are described.
Claims13
A micro-mechanical, switched optical modulator array comprising:
- a substrate;
- a gap layer, overlying the substrate;
- a continuous, uninterrupted modulator layer overlying the gap layer;
- and
- an electrode layer, overlying the modulator layer, the electrode layer including
- an array of arch-shaped electrodes arranged in individual mated pairs distributed along a length of the modulator layer, each individual pair disposed along opposite sides of a top surface of the modulator layer such than none of the electrodes overlies an entire width of the modulator layer and an active optical window region is defined for each mated pair therebetween the individual electrodes comprising the mated pair;
- wherein the active optical window region of the modulator between an individual pair of arch shaped electrodes is substantially reflective to incident light when no potential is applied between the electrode pair and the substrate and the active optical window region of the modulator between the individual pair of electrodes is substantially non-reflective when a potential is applied between the electrode pair and the substrate.
A micro-mechanical, switched optical modulator array comprising:
- a substrate;
- a gap layer, overlying the substrate;
- a continuous, uninterrupted modulator layer overlying the gap layer;
- and
- an electrode layer, overlying the modulator layer, the electrode layer including
- an array of tongue-shaped electrodes arranged in individual mated pairs distributed along a length of the modulator layer, each individual electrode of a particular mated pair disposed along opposite sides of a top surface of the modulator layer such than none of the electrodes overlies an entire width of the modulator layer and an active optical window region is defined for each mated pair therebetween the individual electrodes comprising the mated pair;
- wherein the active optical window region of the modulator between an individual pair of tongue shaped electrodes is substantially reflective to incident light when no potential is applied between the electrode pair and the substrate and the active optical window region of the modulator between the individual pair of electrodes is substantially non-reflective when a potential is applied between the electrode pair and the substrate.
Dependencies are inferred from the claim text.