US 5,943,122 A · Integrated optical measurement instruments

Abstract

A measuring instrument with a parfocal combination of an ultra-violet to near-infrared (UV-NIR) spectrophotometer and a Fourier Transform Infrared (FTIR) spectrometer is disclosed. The parfocal configuration of metrology tools obviates lateral movement of the sample between two separate measurement instruments. Consequently, the area occupied by the parfocal measuring instrument is reduced. Moreover, throughput is increased because there is no need to reposition the sample to properly align the measurement area for the separate measurements. The measuring instrument also includes an imaging apparatus, such as a camera or microscope ocular, to accurately position the measurement area of the sample. Beam directing elements, such as a mirror and objective lenses, are mounted on a common movable member. The common movable member, which may be, e.g., a linear or rotating turret, moves to properly align the desired beam directing element, thereby selecting the specific metrology mode. In addition, the measurement instrument includes a purging shroud along the FTIR spectrometer optical path to efficiently purge any atmospherical gases that may interfere with the FTIR measurement technique.

Claims26

Dependent claims

A measurement instrument for the characterization and measurement of surface, thin-film, and bulk properties of a sample, said measuring instrument comprising:

a spectrophotometer measuring a first area of said sample;
and
a spectrometer measuring a second area of said sample;
wherein said first area of said sample and said second area of said sample overlap, said spectrophotometer measures said first area of said sample and said spectrometer measures said second area of said sample with said sample maintained in approximately the same position.

1 more element

An apparatus for measuring characteristics of a sample, said apparatus comprising:

a stage for mounting said sample, said stage movable to position said sample at a desired location;
a first light source producing light with wavelengths between the ultraviolet and near infrared range, said light being focused at a first measurement area on a surface of said sample;
a spectrophotometer receiving said light with wavelengths between ultraviolet and near infrared from said first measurement;
a second light source producing light with wavelengths in the infrared range, said light being focused at a second measurement area on a surface of said sample;
and
a spectrometer receiving said light with wavelengths in the infrared range from said second measurement area;
wherein said first measurement area and said second measurement area are coincident while holding said stage essentially stationary.

4 more elements

Dependencies are inferred from the claim text.

Integrated optical measurement instruments

Life of this patent

Integrated optical measurement instruments

Life of this patent

Abstract

Claims26