Guide bush and method of forming hard carbon film over the inner surface of the guide bush

Abstract

A hard carbon film is formed directly or through an intermediate layer for enhancing adhesion over an inner surface of a guide bush in such a manner that the thickness of the inner surface at the portion near an open end is greater than that at the inner portion thereof, wherein the inner surface is in sliding contact with a workpiece and the guide bush is mounted on an automatic lathe for holding the workpiece rotatably and slidably in the axial direction near a cutting tool. Accordingly, the guide bush is disposed in a vacuum vessel to form a hard carbon film of a hydrogenated amorphous carbon over the inner surface of the guide bush by a plasma CVD method. At this time, a rodlike auxiliary electrode provided with a stepped portion having an extremity which is smaller than another portion or a rodlike auxiliary electrode provided with a tapered portion having an extremity is inserted into the center bore forming the inner surface of the guide bush in such a manner that the extremity of the tapered portion is positioned near the open end of the inner surface of the guide bush, and the auxiliary electrode is grounded or a positive DC current is applied to the auxiliary electrode.

Dependencies are inferred from the claim text.