Chemical-mechanical contouring (CMC) method for forming a contoured surface
AssigneeAiwa Co., Ltd.
InventorStephen G. Jordan
Life of this patent
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Abstract
A method of fabricating thin film magnetic heads on a thin film substrate uses a chemical-mechanical contouring (CMC) step after completion of the fundamental thin film head structure to form a curved surface on the substrate for the individual thin film magnetic heads of a substantial plurality of heads on a thin film substrate. A special CMC process utilizes a soft polishing pad, applying mechanical contouring motion at a slow speed, typically on the order of 1/3a typical conventional CMP rotational speed, and at a relatively high pressure, typically two to three times a typical conventional CMP applied pressure.
Claims30
A thin film processing method comprising:
- fabricating a finished thin film substrate including a plurality of magnetic thin-film head devices, the magnetic thin-film head devices having a head structure that is raised relative to a planar surface of the thin film substrate, the planar surface transitioning to the raised head structure through a throat height;
- and
- chemical mechanical contouring (CMC) the thin film substrate subsequent to the fabrication step to form a substantially smooth, curved surface overlying ones of the plurality of magnetic thin-film head devices so that throat height is uniform to a defined tolerance among the plurality of magnetic thin-film head devices.
A thin film processing method comprising:
- fabricating a finished thin film substrate including a plurality of thin film magnetic heads, the magnetic thin-film heads being raised relative to a planar surface of the thin film substrate, the planar surface transitioning to the raised head through a throat height;
- and
- chemical mechanical contouring (CMC) the thin film substrate subsequent to the fabrication step to form a substantially smooth, curved surface overlying ones of the plurality of thin film magnetic heads so that throat height is uniform to a defined accuracy among the plurality of magnetic thin-film heads.
Dependencies are inferred from the claim text.