System & method for controlling a process-performing apparatus in a semiconductor device-manufacturing process
AssigneeSamsung Electronics Co., Ltd.
InventorsSang-koog Choi, Jae-Kyung Lee, Sang-woon Kim
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Abstract
A control system of a semiconductor device manufacturing process is disclosed. The system includes a main host computer, host computers connected to the main host computer and process performing apparatuses connected to the host computers. The system checks the integrity of transferred operational instructions between the host computers and process performing apparatuses, in order to prevent errors in the manufacturing process. When the error is detected the system user is notified by audio signals or visual displays.
Claims5
A control system of a semiconductor device manufacturing system, comprising:
- a main host computer for transmitting newly inputted process program information and wafer-to-be-fabricated information via a user to a following host computer, and for displaying an error message;
- a host computer connected to said main host computer for receiving said newly inputted process program information and wafer information transmitted from said main host computer, for transferring said newly inputted process program information and an operation start instruction to a following process performing apparatus, for receiving back up predetermined process program information by initializing the newly inputted process program information from the process performing apparatus, for comparing the newly inputted process program information with the backed up predetermined process program information, and when said backed up predetermined process program information is different from said transmitted newly inputted process program information transferring a stand-by instruction to the following process performing apparatus and transferring an error message to the main host computer;
- and
- a process performing apparatus including a diffusion furnace and a chemical vapor depositor, respectively, connected to said host computer for receiving said newly inputted program information and an operation start instruction from said host computer, for transferring said backed up predetermined process program information to said host computer, and stopping operation if said stand-by instruction is received from said host computer and performing process if said stand-by instruction is not received from aid host computer.
A method of controlling a semiconductor device manufacturing system consisting of a main host computer, host computer and process performing apparatus, said method comprising the steps of:
- transferring process program and wafer-to-be-fabricated information to said host computer when a user inputs them newly to said main host computer, and transmitting an operation start instruction and said newly inputted process program information to said process performing apparatus from said host computer;
- backing-up predetermined process program information by initializing the newly inputted process program information from said process performing apparatus to said host computer;
- judging whether said backed up predetermined process program information is identical to said transmitted newly inputted process program information in said host computer;
- and
- transmitting a stand-by instruction from said host computer to said process performing apparatus if said backed up predetermined process program information is different from said transmitted newly inputted process program information to stop said process performing apparatus, and allowing said process performing apparatus to perform its operation if said backed up predetermined process program information is identical to said transmitted newly inputted process program information.
Dependencies are inferred from the claim text.