Stage feeding device
AssigneeCanon Kabushiki Kaisha
InventorsKotaro Akutsu, Eiji Osanai, Hirohito Ito
Life of this patent
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Abstract
A stage feeding device has a movable guide which is guided on a reference surface of a platen to be movable in the Y-direction, a Y-linear motor for moving the movable guide in the Y-direction, a movable stage which is supported by the movable guide to be movable in the X-direction, and carries an object, and an X-linear motor for moving the movable stage in the X-direction. The stator of the X-linear motor is supported by a second stationary guide to be movable in only the Y-direction independently of the movable guide, and is moved in the Y-direction by a driving mechanism. The stator of the Y-linear motor and the second stationary guide are fixed to the base, and mount members for removing vibrations are arranged between the base and the platen.
Claims16
A stage feeding device comprising:
- a platen having an upper surface serving as a reference surface;
- a first movable member guided on the reference surface to be movable in a first direction;
- first moving means for moving said first movable member in the first direction;
- a second movable member guided by said first movable member to be movable in a second direction substantially perpendicular to the first direction;
- second moving means for moving said second movable member in the second direction;
- support means for supporting said second moving means to be movable in the first direction independently of said first movable member;
- third moving means for moving said second moving means in the first direction;
- a base for supporting said first moving means and said support means;
- and
- vibration removing means, arranged between said base and said platen, for preventing a vibration from being transmitted therebetween.
Dependencies are inferred from the claim text.