Micromechanical device including time-release passivant

Abstract

An electronic device (10) such as that of the micromechanical type having a time-released source of a passivant (20). This source (20) is preferably comprised of an impregnated molecular sieve/binder combination, preferably being a polymer. The passivant may be PFDA. The time-released passivant source continuously over the life of the device reduces any tendency of engaged or contacting elements to stick, adhere, or otherwise resist separation. The present invention finds particular use in spatial light modulators of the DMD type. The molecular sieve/binder can also include getter/desiccant source, such as a non-evaporable getter to remove moisture from the hermetically sealed electronic device.

Dependencies are inferred from the claim text.