Field-effect photo-transistor
AssigneeLucent Technologies Inc.
InventorAristides A. Yiannoulos
Life of this patent
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Abstract
A field-effect photo-transistor, being a three-terminal photosensing electrical device, based on integrated metal oxide semiconductor (MOS) technology. The device features a high output impedance which makes it particularly suitable as a photosensor for active pixel imaging arrays. Unlike the bipolar photo-transistor, which is a device well known in the art, the field-effect phototransistor is more compatible with MOS VLSI (Very Large Scale Integration) technology by inherently being a unipolar type device. Active pixel imaging arrays based on the disclosed invention can be integrated on the same semiconductor substrate with conventional digital or mixed signal processing functions to produce single-chip image processors for video or still picture cameras.
Claims44
A high output impedance, three-terminal, photosensing electrical device (e.g., 10A, 10B) integrated on a semiconductor substrate, the photosensing electrical device having a body terminal, a gate terminal, and a drain terminal, the body terminal being an electrical contact to the semiconductor substrate bulk, and the photosensing electrical device comprising:
- (a) a four-terminal MOSFET (Metal Oxide Semiconductor Field-Effect Transistor) having a body terminal, a source terminal, a gate terminal, and a drain terminal;
- and
- (b) a junction photo-diode having an anode side and a cathode side, wherein:
- if the semiconductor substrate is p type, then the anode side is the semiconductor substrate bulk and the cathode side is an n-type feature diffused into the semiconductor substrate;
- if the semiconductor substrate is n type, then the cathode side is the semiconductor substrate bulk and the anode side is a p-type feature diffused into the semiconductor substrate;
- the source terminal of the MOSFET is electrically connected to the side of the photo-diode being a feature diffused into the semiconductor substrate;
- if the semiconductor substrate is p type, then the MOSFET is n-channel type;
- if the semiconductor substrate is n type, then the MOSFET is p-channel type;
- the gate terminal of the MOSFET is the gate terminal of the photosensing electrical device;
- the drain terminal of the MOSFET is the drain terminal of the photosensing electrical device;
- and
- the body of the MOSFET is electrically connected to the semiconductor substrate bulk.
A high output impedance, three-terminal photosensing electrical device (e.g., 80A, 80B) integrated on a semiconductor substrate, the photosensing electrical device having a body terminal, a gate terminal, and a drain terminal, the body terminal being an electrical contact to the semiconductor substrate bulk, and the photosensing electrical device comprising:
- (a) a four-terminal MOSFET having a body terminal, a source terminal, a gate terminal, and a drain terminal, wherein:
- if the semiconductor substrate is p type, then the MOSFET is n-channel type;
- and
- if the semiconductor substrate is n type, then the MOSFET is p-channel type;
- and
- (b) an MOS photogate, comprising:
- (1) an MOS photo-capacitor sub-structure having a substrate side and a field-plate side, wherein:
- the dielectric medium is a thin (gate) dielectric layer;
- the substrate side is the semiconductor substrate bulk;
- the field plate side is a conducting thin-film layer;
- and
- the combination of thin dielectric layer and conducting thin-film layer are adequately transparent to a target portion of incident-light spectrum;
- and
- (2) a junction-diode sub-structure having an anode side and a cathode side, wherein:
- if the semiconductor substrate is p type, then the anode side is the semiconductor substrate bulk and the cathode side is an n-type feature diffused into the semiconductor substrate;
- if the semiconductor substrate is n type, then the cathode side is the semiconductor substrate bulk and the anode side is a p-type feature diffused into the semiconductor substrate, wherein:
- the diffused side of the junction-diode sub-structure abuts the photo-capacitor sub-structure such that the space-charge region of the junction-diode sub-structure and the space-charge region, forming in the semiconductor substrate side of the photo-capacitor sub-structure when the photo-capacitor is biased into inversion or depletion, merge into one contiguous space-charge region;
- the body of the MOSFET is electrically connected to the semiconductor substrate bulk;
- the source terminal of the MOSFET is electrically connected to the diffused side of the junction diode sub-structure;
- the gate terminal of the MOSFET is electrically connected to the field plate side the photo-capacitor sub-structure;
- the drain terminal of the MOSFET is the drain terminal of the photosensing electrical device;
- and
- the gate terminal of the MOSFET is the gate terminal of the photosensing electrical device.
A high output impedance, three-terminal, photosensing electrical device (e.g., 150) integrated on a semiconductor substrate, the photosensing electrical device having a body terminal, a gate terminal, and a drain terminal, the body terminal being an electrical contact to the semiconductor substrate bulk, and the photosensing electrical device comprising:
- (a) an MOS photo-capacitor sub-structure having a semiconductor substrate side and a field-plate side, wherein:
- the dielectric medium is a thin (gate) dielectric layer;
- the substrate side is the semiconductor substrate bulk;
- the field plate side is a conducting thin-film layer;
- and
- the combination of thin dielectric layer and conducting thin-film layer are adequately transparent to a target portion of incident-light spectrum;
- and
- (b) a junction-diode sub-structure having an anode side and a cathode side, wherein:
- if the semiconductor substrate is p type, then the anode side is the semiconductor substrate bulk and the cathode side is an n-type feature diffused into the semiconductor substrate;
- if the semiconductor substrate is n type, then the cathode side is the semiconductor substrate bulk and the anode side is a p-type feature diffused into the semiconductor substrate;
- the gate terminal of the photosensing electrical device is an electrical contact to the field plate of the photo-capacitor sub-structure;
- the drain terminal of the photosensing electrical device is an electrical contact to the diffused side of the junction-diode sub-structure;
- the diffused side of the junction-diode sub-structure abuts the photo-capacitor sub-structure such that the space-charge region of the junction-diode sub-structure and the space-charge region, forming in the semiconductor substrate side of the photo-capacitor sub-structure when the photo-capacitor is biased into inversion or depletion, merge into one contiguous space-charge region;
- the photo-capacitor sub-structure is divided into two regions, each inverting at a different threshold voltage;
- if the semiconductor substrate is p-type, then the junction-diode sub-structure abuts only the region of the photo-capacitor sub-structure with the (algebraically) higher threshold voltage;
- and
- if the semiconductor substrate is n-type, then the junction-diode sub-structure abuts only the region of the photo-capacitor sub-structure with the (algebraically) lower threshold voltage.
A high output impedance, three-terminal, photosensing electrical device (e.g., 160A, 160B) integrated on a semiconductor substrate, the photosensing electrical device having a body terminal, a gate terminal, and a drain terminal, the body terminal being an electrical contact to the semiconductor substrate bulk, and the photosensing electrical device comprising:
- (a) an MOS photo-capacitor sub-structure having a semiconductor substrate side and a field-plate side, wherein:
- the dielectric medium is a thin (gate) dielectric layer;
- the substrate side is the semiconductor substrate bulk;
- the field-plate side is a conducting thin-film layer;
- and
- the combination of thin dielectric layer and conducting thin-film layer are adequately transparent to a target portion of incident-light spectrum;
- and
- (b) a junction-diode sub-structure having an anode side and a cathode side, wherein:
- if the semiconductor substrate is p type, then the anode side is the semiconductor substrate bulk and the cathode side is an n-type feature diffused into the semiconductor substrate;
- if the semiconductor substrate is n type, then the cathode side is the semiconductor substrate bulk and the anode side is a p-type feature diffused into the semiconductor substrate;
- the gate terminal of the photosensing electrical device is an electrical contact to the field plate of the photo-capacitor sub-structure;
- the drain terminal of the photosensing electrical device is an electrical contact to the diffused side of the junction-diode sub-structure;
- the diffused side of the junction-diode sub-structure abuts the photo-capacitor sub-structure such that the space-charge region of the junction-diode sub-structure and the space-charge region, forming in the semiconductor substrate side of the photo-capacitor sub-structure when the photo-capacitor is biased into inversion or depletion, merge into one contiguous space-charge region;
- the photo-capacitor sub-structure is divided into one or more regions, each inverting at a different threshold voltage;
- if the semiconductor substrate is p-type, then the junction-diode sub-structure abuts only the region of the photo-capacitor sub-structure with the (algebraically) highest threshold voltage;
- and
- if the semiconductor substrate is n-type, then the junction-diode sub-structure abuts only the region of the photo-capacitor sub-structure with the (algebraically) lowest threshold voltage.
Dependencies are inferred from the claim text.