Laser scanning optical microscope
AssigneeKowa Company, Ltd.
InventorKoji Kobayashi
Life of this patent
Estimating the term…
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AssigneeKowa Company, Ltd.
InventorKoji Kobayashi
Estimating the term…
A laser scanning optical microscope comprises a first optical scanning device for generating a laser beam and scanning a specimen with the laser beam in a direction at a preselected frequency. A drive circuit controls the first optical scanning device to scan the specimen with the laser beam. A pair of second optical scanning devices scan the laser beam in directions perpendicular and parallel to the scanning direction of the first optical scanning device at two frequencies lower than the preselected frequency. A light receiving device receives light reflected or transmitted by the scanned specimen and produces a photoelectric signal. A signal processing device converts the photoelectric signal obtained from the light receiving device to a standard television scanning signal corresponding to a laser beam scanning pattern obtained with the first optical scanning device and the pair of second optical scanning devices.
A laser scanning optical microscope in which a laser beam from a laser light source is focussed to a small spot by an objective optical system and projected onto a specimen while also being scanned two-dimensionally, and light reflected or transmitted by the specimen is detected and photoelectrically converted by light receiving means to thereby obtain image information on the specimen, the laser scanning optical microscope comprising:
A laser scanning optical microscope comprising:
Dependencies are inferred from the claim text.