Loading patent…
AssigneeJapan Science and Technology Corporation
InventorsYuzo Mori, Toshio Ishikawa
Estimating the term…
There are provided a method for performing high-efficiency machining by high-density radical reaction using a rotating electrode, in which a large amount of the reaction gas is supplied to a machining gas between a machining electrode and a workpiece under control, and the limit value of a making power is elevated so that the density of neutral radicals is increased to remarkably improve the machining rate 10 to 100 times as large as the conventional machining rate, and the prevention of arc discharge and the thermal stabilization are made. An endless machining electrode and the workpiece are disposed in gas atmosphere containing a reactive gas and an inactive gas with a machining gap therebetween, and a high-frequency power is supplied to the machining electrode, and the machining electrode is rotated at a high speed to move the surface of the machining electrode with respect to the machining progress portion at a high speed and to catch the gas by the surface of the machining electrode, thereby forming a gas flow which is transverse to the machining gap, and a volatile material generated by the radical reaction of the neutral radicals produced in plasma generated in the machining gap with atoms or molecules which constitute the machining progress portion of the workpiece is gasified and removed to progress machining.
A method of performing high-efficiency machining by high-density radical reaction using a rotating electrode, in which an endless machining electrode and a workpiece are disposed in a gas atmosphere wherein an inactive gas is mixed with a reactive gas selected in accordance with a material of the workpiece, the machining electrode is rotated at a high speed while maintaining a machining gap between said machining electrode and the machining progress portion of the workpiece, to move the surface of said machining electrode with respect to the machining progress portion at a high speed and to catch the gas by the surface of the machining electrode, thereby forming a gas flow which is transverse to said machining gap, and a high-frequency voltage is applied to the machining electrode to generate plasma in the machining gap, neutral radicals are generated on the basis of the reactive gas, a volatile material produced by the radical reaction of said neutral radicals with atoms or molecules which constitute the machining progress portion of the workpiece is gasified and removed, and the machining electrode and the workpiece are moved relatively to progress machining.
A high-efficiency machining device due to high-density radical reaction using a rotating electrode, comprising:
A rotating electrode for use in the high-efficiency machining method due to the high-density radical reaction, in which while a machining gap is maintained between a machining electrode and the machining progress portion of a workpiece which are disposed in a gas atmosphere wherein an inactive gas is mixed with a reactive gas selected in accordance with a material of the workpiece, the machining electrode is rotated at a high speed so that the gas is caught by the surface of said rotating electrode, to thereby form the flow of gas which is transverse to said machining gap, a high-frequency voltage is applied to the rotating electrode to generate plasma in the machining gap so that neutral radicals are generated on the basis of the reactive gas, a volatile material generated by the radical reaction of said neutral radical with atoms or molecules which constitute the machining progress portion of the workpiece is gasified and removed, and the machining electrode and the workpiece are moved relatively to progress machining, wherein an insulator coat high in corrosion resistance to the neutral radical is formed on at least a surface of the machining electrode corresponding to the plasma generation region.
Dependencies are inferred from the claim text.