Apparatus and method for forming films

An apparatus for forming a film on a substrate, said apparatus comprising:

• a rotating device for supporting and rotating the substrate about a rotary axis;
• an ink jet head having a plurality of liquid discharge nozzles disposed so as to confront the substrate supported on said rotating device, wherein each of said nozzles comprises a liquid discharge port, and an air discharge port aligned with said liquid discharge port,
• wherein air can be discharged through said air discharge port to vary a pressure balance between a liquid pressure in said liquid discharge port and an air pressure in a vicinity of said liquid discharge port so as to discharge the liquid;
• an electrode member provided about a periphery of each of said plurality of air discharge ports;
• a potential difference applying device for applying a potential difference between said electrode member and any liquid within said liquid discharge port such that liquid discharged from said ink jet head is electrically charged;
• a moving device for moving one of said ink jet head and said rotating device relative to the other of said ink jet head and said rotating device in such a manner that said ink jet head is moved relative to said rotating device and the substrate, when mounted thereon, in an approximately radial direction of said rotating device between a first region of the substrate near said rotary axis and an outer periphery of the substrate;
• and
• a control device for controlling said moving device and said rotating device such that a moving speed of said ink jet head or the rotary speed of the substrate decreases as said ink jet head moves from the center to the outer periphery of the substrate, wherein said control device controls said moving device such that an angular velocity of rotation effected by said rotating device is reduced as a position of said ink jet head relative to said rotating device changes from said first region of the substrate to said outer periphery of the substrate.

An apparatus for forming a film on a substrate, said apparatus comprising:

• a rotating device for supporting and rotating the substrate about a rotary axis;
• an ink jet head having a plurality of liquid discharge nozzles disposed so as to confront the substrate supported on said rotating device;
• a moving device for moving one of said ink jet head and said rotating device relative to the other of said ink jet head and said rotating device in such a manner that said ink jet head is moved relative to said rotating device and the substrate, when mounted thereon, in an approximately radial direction of said rotating device between a first region of the substrate near said rotary axis and an outer periphery of the substrate;
• a control device for controlling said moving device and said rotating device such that a moving speed of said ink jet head or the rotary speed of the substrate decreases as said ink jet head moves from the center to the outer periphery of the substrate, wherein said control device controls said moving device such that an angular velocity of rotation effected by said rotating device is reduced as a position of said ink jet head relative to said rotating device changes from said first region of the substrate to said outer periphery of the substrate;
• a supply of liquid including a solution-state substance containing a film forming material and a solvent for dissolving said film forming material;
• a stage provided on said rotating device for receiving the substrate thereon;
• and
• a heater connected to said stage so as to heat the substrate when mounted on said stage.

An apparatus for forming a film on a substrate, said apparatus comprising:

• a rotating device for supporting and rotating the substrate about a rotary axis;
• an ink jet head having a plurality of liquid discharge nozzles disposed so as to confront the substrate supported on said rotating device, wherein said ink jet head comprises an electrostatic attraction ink jet head which attracts liquid outwardly of said nozzles by an electrostatic force;
• a moving device for moving one of said ink jet head and said rotating device relative to the other of said ink jet head and said rotating device in such a manner that said ink jet head is moved relative to said rotating device and the substrate, when mounted thereon, in an approximately radial direction of said rotating device between a first region of the substrate near said rotary axis and an outer periphery of the substrate;
• and
• a control device for controlling said moving device and said rotating device such that a moving speed of said ink jet head or the rotary speed of the substrate decreases as said ink jet head moves from the center to the outer periphery of the substrate, wherein said control device controls said moving device such that an angular velocity of rotation effected by said rotating device is reduced as a position of said ink jet head relative to said rotating device changes from said first region of the substrate to said outer periphery of the substrate.