US 5,934,856 AGranted

Multi-chamber treatment system

AssigneeTokyo Electron Limited

InventorsTeruo Asakawa, Hiroaki Saeki

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Abstract

Vacuum process chambers are increased or decreased in number when the kind or order of processes is changed, and the shape and size of the transfer chamber are changed with the increase or decrease of the number of the vacuum process chambers, without entailing any change in a load-lock chamber and a transfer arm. The transfer arm has a minimum radius of rotation such that the arm can rotate in a transfer chamber of a minimum size corresponding to a minimum number of vacuum process chambers and a maximum arm reach such that the arm can deliver an object to-be-treated between each vacuum process chamber and a transfer chamber of a maximum size corresponding to a maximum number of vacuum process chambers. Thus, even though the number of the vacuum process chambers are increased or decreased with the change of the processes, it is necessary only that the shape and size of the transfer chamber be changed, and the other components, such as the load-lock chamber, transfer arm, etc., can be used in common, so that the manufacture and assembling of the system are very easy, ensuring a reduction in cost. Also, reduced-pressure treatment apparatus and a normal-pressure treatment apparatus are connected to each other by means of the load-lock chamber for replacement between the atmosphere and vacuum.

Claims12

Dependent claims

A multi-chamber treatment system comprising:

a substantially polygonal transfer chamber,
a plurality of vacuum process chambers arranged in a polygonal shape around the transfer chamber, the number of which is initially variable and in each of which a process is to performed, each of the vacuum process chambers communicating with the transfer chamber through a first type gate valve,
wherein the number of vacuum process chambers to be arranged around the transfer chamber is set in direct dependence upon the desired number of processes to be performed, and wherein the transfer chamber has a shape and size designed according to the set number of vacuum process chambers,
at least one load-lock chamber communicating with the transfer chamber through a second type gate valve, and
a rotatable and expandable transfer arm having a hand portion for holding an object to-be-treated, and multi-joint arms including a first portion and a second portion which are rotatable connected, the transfer arm being located in the transfer chamber and adapted to fetch the object to-be-treated from said at least one load-lock chamber and to carry the object to-be-treated into each vacuum process chamber, and to remove the object processed from each vacuum process chamber and return the object to said at least one load-lock chamber;
the transfer arm being extendable from a minimum extension defining a radius of rotation such that the arm can rotate in a transfer chamber of a minimum size corresponding to a minimum number of vacuum process chambers to a maximum arm extension such that the transfer arm can deliver the object to-be-treated to each vacuum process chamber when the transfer chamber is of a maximum size corresponding to a maximum number of vacuum process chambers,
wherein a minimum radius R of rotation of the transfer arm is defined as ##EQU3## such that when .theta..sub.2 =0, ##EQU4## and wherein r.sub.1 is a radius of the first portion of the multi-joint arms,
.theta..sub.2 is a minimum opening angle between a center line (L3) of the transfer arm and a center line (L4) of the multi-joint arms,
W.sub.r is a radius of the object to-be-treated, and
Q is a maximum arm extension.

7 more elements

A multi-chamber treatment system comprising:

a substantially polygonal transfer chamber,
a plurality of vacuum process chambers arranged in a polygonal shape around the transfer chamber, the number of which is initially variable and in each of which a process is to be performed, each of the vacuum process chambers communicating with the transfer chamber through a gate valve,
wherein the number of vacuum process chambers in communication with the transfer chamber is set in direct dependence upon the processes to be performed and wherein the transfer chamber has a shape and a size designed according to the set number of vacuum process chambers,
at least one load-lock chamber communicating with the transfer chamber through a gate valve, and
a rotatable and expandable transfer arm having a pair of hand portions for holding an object to-be-treated, and multi-joint arms including a first portion and a second portion which are rotatable connected, the transfer arm being located in the transfer chamber and adapted to fetch the object to-be-treated from said at least one load-lock chamber and to carry the object to-be-treated into each vacuum process chamber, and to remove the object processed from each vacuum process chamber and return the object to said at least one load-lock chamber;
the transfer arm being extendable from a minimum extension defining a radius of rotation such that the arm can rotate in a transfer chamber of a minimum size corresponding to a minimum number of vacuum process chambers to a maximum arm extension such that the transfer arm can deliver the object to be-treated to each vacuum process chamber when the transfer chamber is of a maximum size corresponding to a maximum number of vacuum process chambers,
wherein a minimum radius R of rotation of the arm is defined as ##EQU5## such that when .theta..sub.2 =0 ##EQU6## and wherein r.sub.1, is a radius of the first portion of the multi-joint arms,
.theta..sub.2 is a minimum opening angle between a center line (L3) of the transfer arm and a center line (L4) of the multi-joint arms,
W.sub.r is a radius of the object to-be-treated, and
Q is a maximum arm extension.

7 more elements

Dependencies are inferred from the claim text.

Facts

Application: 08/837,948Filed 28 Apr 1997 · continuation in part
Priority: JP 6-10848323 May 1994
Granted: 10 Aug 1999
Term ends: Not estimatedThe source records don’t support an estimate.

Classification15 codes

H10P 72/0452
Apparatus for manufacturing or treating in a plurality of work-stations: characterised by the layout of the process chambers
C23C 16/54
Characterised by the method of coating: apparatus specially adapted for continuous coating
F16K 51/02
Other details not peculiar to particular types of valves or cut-off apparatus: specially adapted for high-vacuum installations
H10P 72/0441
Apparatus for manufacture or treatment: apparatus for sealing, encapsulating, glassing, decapsulating or the like