Display device and production method thereof with insulating members between pixel electrodes for smooth surface
AssigneeCanon Kabushiki Kaisha
InventorYoshihiko Fukumoto
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Abstract
Disclosed herein is a method of producing a display device comprising a substrate and a plurality of conductive members provided on the substrate, said conductive members each having a substantially even surface and making up pixels, wherein the conductive members are smoothed by means of chemical mechanical polishing.
Claims125
A display device comprising a substrate and a plurality of conductive members provided on the substrate, each of said conductive members having a substantially even surface which acts as a pixel electrode connected to a switching element comprising a silicon layer, wherein insulating members each having a substantially even surface and comprising silicon atoms are provided at ends of their corresponding conductive members in such a manner that the substantially even surface of the insulating member ranges with the substantially even surface of the conductive member.
A display device comprising an active matrix substrate, in which a switching transistor containing a silicon layer is provided for each pixel electrode, an electrode substrate opposite to the active matrix substrate and a liquid crystal held between these substrates, wherein the surfaces of pixel electrodes are on the same level with each other, and at least a part of a side wall of each of the pixel electrodes comes into contact with an insulator containing silicon atoms.
A method of producing a display device having a substrate and a plurality of conductive members provided on the substrate, said conductive members each having a substantially even surface which acts as a pixel electrode, comprising the steps of:
- providing an insulating layer on the substrate;
- patterning the insulating layer to leave a separation region between said pixel electrodes to be formed;
- forming a conductive material on said patterned insulating layer;
- and
- smoothing the surface of said conductive material by means of chemical mechanical polishing to obtain said conductive members.
A method of producing a display device comprising an active matrix substrate, in which a switching transistor is provided for each pixel electrode, a common electrode substrate opposite to the active matrix substrate and a liquid crystal held between these substrates, wherein the active matrix substrate is produced by the following steps:
- preparing a substrate;
- forming a plurality of transistors on the substrate;
- forming an insulating layer on said transistors;
- patterning the insulating layer to leave a separation region between said pixel electrodes to be formed;
- forming a conductive material on said patterned insulating layer;
- and
- smoothing the surface of said conductive material by means of chemical mechanical polishing to obtain said pixel electrodes.
An active matrix substrate comprising:
- a substrate;
- a plurality of switching elements provided on said substrate;
- a plurality of conductive members comprised in a plurality of pixels, with each of said switching elements containing a silicon layer, and each of said conductive members provided on said substrate and having a substantially even surface and being connected to said switching element;
- and
- insulating members each comprising silicon atoms provided at ends of their corresponding conductive members in such a manner that said insulating member ranges with the substantially even surface of said conductive member.
A method of producing an active matrix substrate comprising a substrate, a plurality of switching elements provided on said substrate, and a plurality of conductive members comprised in a plurality of pixels, with each of the conductive members being provided on the substrate and having a substantially even surface and being connected to the switching element, said method comprising the steps of:
- preparing a substrate;
- forming the switching elements on the substrate;
- forming an insulating layer on the switching elements;
- patterning the insulating layer to leave a separation region for the pixels between the pixels to be formed;
- forming a conductive material on the patterned insulating layer;
- and
- smoothing the surface of the conductive material by means of chemical mechanical polishing to obtain the conductive members.
A display device comprising:
- an active matrix substrate comprising a substrate;
- a plurality of switching elements provided on said substrate;
- a plurality of conductive members comprised in a plurality of pixels, with each of said switching elements containing a silicon layer, and each of said conductive members being provided on said substrate and having a substantially even surface and being connected to said switching element;
- an opposite substrate comprising an electrode opposite to said pixels;
- a liquid crystal material held between said active matrix substrate and said opposite substrate;
- and
- insulating members each comprising silicon atoms provided at ends of their corresponding conductive members in such a manner that said insulating member ranges with the substantially even surface of said conductive member.
A method of producing a display device comprising an active matrix substrate comprising a substrate, a plurality of switching elements provided on said substrate, and a plurality of conductive members comprised in a plurality of pixels, with each of the conductive members being provided on the substrate and having a substantially even surface and being connected to the switching element, an opposite substrate comprising an electrode opposite to the pixels, and a liquid crystal material held between the active matrix substrate and the opposite substrate, said method comprising the steps of:
- preparing a substrate;
- forming the switching elements on the substrate;
- forming an insulating layer on the switching elements;
- patterning the insulating layer to leave a separation region for the pixels between the pixels to be formed;
- forming a conductive material on the patterned insulating layer;
- and
- smoothing the surface of the conductive material by chemical mechanical polishing to obtain the conductive members.
Dependencies are inferred from the claim text.