Method for fabricating with ultrasonic vibration a carbon coating

A method for fabricating a carbon coating or a coating mainly containing carbon comprising the steps of:

• disposing a substrate on one of a pair of electrodes which interpose a piezoelectric element therebetween and are connected with a power supply for applying a voltage to said piezoelectric element through said pair of electrodes therefrom;
• applying a high-frequency voltage to one of a pair of plasma electrodes which is provided under said one of the pair of electrodes interposing the piezoelectric element therebetween;
• and
• introducing a reactive gas between said pair of plasma electrodes with the other of said pair of plasma electrodes being grounded to form the carbon coating or the coating mainly containing carbon on said substrate while said substrate is ultrasonic-vibrated.

A method for fabricating a carbon coating or a coating mainly containing carbon comprising the steps of:

• moving a film-shaped object between a grounded electrode and an electrode connected with a high-frequency power supply from a take-out drum to a wind-up drum through at least two guide rollers, said electrode connected with a high-frequency power supply being provided between said two guide rollers;
• giving ultrasonic vibrations to said film-shaped object from said two guide rollers;
• and
• introducing a reactive gas between said grounded electrode and said electrode connected with a high-frequency power supply to form the carbon coating or the coating mainly containing carbon on said film-shaped object by plasma generated between said grounded electrode and said electrode connected with a high-frequency power supply.

A method of fabricating a carbon coating on a surface of an object, comprising the steps of:

• locating the object on a side of an electrode connected to a power supply;
• supplying ultrasonic vibrations to the object;
• and
• generating discharge between the electrode connected to the power supply and an electrode which is grounded, to fabricate the carbon coating on the surface of the object.

A method of fabricating a carbon coating on a surface of a magnetic recording medium, comprising the steps of:

• locating the magnetic recording medium on a side of an electrode connected to a power supply;
• supplying ultrasonic vibrations to the magnetic recording medium;
• and
• generating discharge between the electrode connected to the power supply and an electrode which is grounded, to fabricate the carbon coating on the surface of the magnetic recording medium.

A method of fabricating a protective film for a magnetic recording medium, comprising the steps of:

• supplying ultrasonic vibrations to a tape-shaped object on a place except for a space between a pair of electrodes, to remove particles adhering to a surface of the tape-shaped object;
• and
• fabricating a carbon coating on the surface of the tape-shaped object while the tape-shaped object passes between the electrodes,
• wherein the fabricated carbon coating includes pin-holes, and the number of said pin-holes is 30/mm.sup.2 or less.

A method of fabricating a carbon coating or a coating mainly containing carbon, comprising the steps of:

• moving a film-shaped object between a grounded electrode and an electrode connected with a high-frequency power supply from a take-out drum to a wind-up drum;
• giving ultrasonic vibrations to said film-shaped object from said electrode connected with a high-frequency power supply;
• and
• introducing a reactive gas between said grounded electrode and said electrode connected with a high-frequency power supply to form the carbon coating or the coating mainly containing carbon on said film-shaped object by plasma generated between said grounded electrode and said electrode connected with a high-frequency power supply.

A method of fabricating a carbon coating or a coating mainly containing carbon, comprising the steps of:

• moving a film-shaped object between a grounded electrode and an electrode connected with a high-frequency power supply from a take-out drum to a wind-up drum;
• giving ultrasonic vibrations to said film-shaped object in a direction perpendicular to said film-shaped object from said electrode connected with a high-frequency power supply;
• and
• introducing a reactive gas between said grounded electrode and said electrode connected with a high-frequency power supply to form the carbon coating or the coating mainly containing carbon on said film-shaped object by plasma generated between said grounded electrode and said electrode connected with a high-frequency power supply.

A method of fabricating a carbon coating or a coating mainly containing carbon, comprising the steps of:

• moving a film-shaped object between a grounded electrode and an electrode connected with a high-frequency power supply from a take-out drum to a wind-up drum;
• giving ultrasonic vibrations to said film-shaped object in a direction parallel to said film-shaped object from said electrode connected with a high-frequency power supply;
• and
• introducing a reactive gas between said grounded electrode and said electrode connected with a high-frequency power supply to form the carbon coating or the coating mainly containing carbon on said film-shaped object by plasma generated between said grounded electrode and said electrode connected with a high-frequency power supply.