Method and apparatus for securely supporting a growing crystal in a czochralski crystal growth system
AssigneeGeneral Signal Technology Corporation
InventorZhixin Li
Life of this patent
Estimating the term…
Abstract
A puller apparatus for a Czochralski crystal puller system is provided which includes a primary puller chuck and a secondary puller chuck. The primary puller chuck is attached to a seed crystal. The secondary puller chuck is shaped to enclose and retain a portion of a growing crystal so that the growing crystal can be pulled by the secondary puller chuck.
Claims21
An apparatus for forming a crystal structure, the apparatus comprising:
- a hermetic vessel having an interior and an exterior and enclosing the crystal structure during formation;
- a first seed chuck for holding a first part of the crystal structure;
- a second seed chuck having a gate for holding a second part of the crystal structure;
- a first pulling mechanism positioned on the vessel exterior;
- a second pulling mechanism;
- a first connector for connecting the first pulling mechanism to the first seed chuck, the first pulling mechanism moving the first seed chuck;
- a second connector for connecting the second pulling mechanism to the second seed chuck, the second pulling mechanism moving the second seed chuck;
- and
- a rotating platform positioned on the vessel exterior and supporting the first pulling mechanism and the second pulling mechanism.
An apparatus for securely gripping a crystal in a Czochralski crystal growing system having a hermetic vessel with an interior and an exterior and enclosing the crystal during formation, a rotating platform positioned on the vessel exterior, a first seed chuck for holding a first part of the crystal structure, a first pulling mechanism having a first drum positioned on the rotating platform, the first drum rotating about a first axis and a first cable connecting the first drum to the first seed chuck, the apparatus comprising:
- a second seed chuck for holding a second part of the crystal;
- a second pulling mechanism having a second drum positioned on the rotating platform, the second drum rotating about a second axis and a third drum positioned on the rotating platform, the third drum rotating about a third axis collinear with the second axis and parallel to the first axis;
- a second cable for connecting the second drum to the second seed chuck;
- and
- a third cable for connecting the third drum to the second seed chuck.
Dependencies are inferred from the claim text.