Method of manufacturing rigid floating microstructure elements and a device equipped with such elements
AssigneeCommissariat A L'energie
InventorMichel Vilain
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Abstract
A method of manufacturing elements of floating rigid microstructures and a device equipped with such elements. This method of manufacturing at least one element of a microstructure (104, 116) in a substrate including a stacking of a support layer (100), a layer (102) of sacrificial material and a structure layer (104) comprises the following steps: a) etching in the substrate a relief structure (108) with lateral sides (110a, 110b) b) formation of a so-called rigidity lining (116) on the lateral sides (110a, 110b), c) removal of the sacrificial material from the relief structure (108) in order to release the floating microstructure.
Claims13
A method of manufacturing at least one rigid floating microstructure element machined in a substrate comprising a stacking of a support layer, at least one first sacrificial material layer and at least one first so-called structure layer, characterised in that it comprises the following steps:
- a) formation of at least one relief structure with lateral sides by etching the first structure layer and by etching at least a part of the first layer of sacrificial material, according to an etching pattern corresponding to the floating microstructure element,
- b) formation of a so-called rigidity lining on the lateral sides,
- c) removal of the sacrificial material from each relief structure in order to release the floating microstructure comprising the structure layer and the rigidity lining.
Dependencies are inferred from the claim text.