Low mass optical coating for thin film detectors
AssigneeTexas Instruments Incorporated
InventorsHoward R. Beratan, Chih-Chen Cho
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Abstract
A thermal detector having an optical coating comprising a porous film 64. The porous film preferably comprises a xerogel or aerogel and is greater than 80% porous. An optional optical impedance matching layer 66 may be deposited over the porous film 64. Advantages include decreased thickness of the thermal sensor, improved acuity of the image produced by the system, lower manufacturing temperatures, and the ability to use electrodes that are opaque to infrared energy.
Claims15
A thermal detector comprising:
- a substrate;
- a support means;
- a first electrode above said substrate and said support means;
- a thermally sensitive element over said first electrode;
- a second electrode over said thermally sensitive element;
- and
- an optical coating comprising a porous film over said second electrode;
- wherein said support means provides thermal isolation and electrical connectivity between at least said first electrode, said second electrode and said substrate, wherein said thermally sensitive element comprises a self-supporting means.
A thermal detector comprising:
- a substrate;
- a support means;
- a first electrode above said substrate and said support means;
- a thermally sensitive element over said first electrode;
- a second electrode over said thermally sensitive element;
- an optical coating comprising a porous film over said second electrode;
- and
- an optical impedance matching layer over said porous film,
- wherein said support means provides thermal isolation and electrical connectivity between at least said first electrode, said second electrode and said substrate.
A method for fabricating a thermal detector, comprising the steps of:
- providing a substrate;
- depositing a spacer-insulator material on said substrate;
- providing a support means;
- depositing a first conductor layer over said spacer-insulator layer and said support means;
- patterning said first conductor layer to form a bottom array of electrodes;
- depositing a thermally sensitive layer over said electrodes;
- patterning said thermally sensitive layer to form thermally sensitive elements;
- depositing a second conductor layer over said thermally sensitive elements;
- patterning said second conductor layer to form a top array of electrodes;
- depositing a precursor film on said second conductive layer;
- gelling said precursor film to form a porous film;
- and
- depositing an optical impedance matching layer over said porous film.
A method for fabricating a thermal detector, comprising the steps of:
- providing a substrate;
- depositing a spacer-insulator material on said substrate;
- providing a support means;
- depositing a first conductor layer over said spacer-insulator layer and said support means;
- patterning said first conductor layer to form a bottom array of electrodes;
- depositing a first temporary filler material over said bottom array of electrodes;
- depositing a thermally sensitive layer over said electrodes;
- patterning said thermally sensitive layer to form thermally sensitive elements;
- depositing a second conductor layer over said thermally sensitive elements;
- patterning said second conductor layer to form a top array of electrodes;
- depositing a second temporary filler material over said top array of electrodes;
- depositing a precursor film on said second conductive layer;
- and
- gelling said precursor film to form a porous film.
Dependencies are inferred from the claim text.