Aqueous stripping and cleaning compositions containing hydroxylamine and use thereof
AssigneeAdvanced Scientific Concepts, Inc.
InventorsIrl E. Ward, Francis Michelotti
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Abstract
An aqueous stripping composition comprising a mixture of about 55% to 70% by weight of a polar amine solvent, about 22.5 to 15% by weight of a basic amine, especially hydroxylamine, a corrosion inhibitor and water. The stripping composition is effective for stripping photoresists, residues from plasma process generated organic, metal-organic materials, inorganic salts, oxides, hydroxides or complexes in combination with or exclusive of organic photoresist films at low temperatures.
Claims2
An aqueous stripping composition comprising an admixture of about 58 to 63% by weight of 2-(2-aminoethoxy) ethanol, about 19% by weight of hydroxylamine, about 1 to 2% by weight of gallic acid and the remainder being water.
Dependencies are inferred from the claim text.