Cleaning apparatus
AssigneePre-Tech Co., Ltd.
InventorKazuhiko Shiba
Life of this patent
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Abstract
A cleaning apparatus is disclosed which is capable of simultaneously and precisely cleaning two sides of a substrate required to be cleaned, such as a silicon wafer. The cleaning apparatus has a holding unit for horizontally holding a substrate required to be cleaned, a rotating unit for rotating the holding unit, a first cleaning-fluid injection unit disposed above the holding unit and arranged to inject cleaning fluid with high-frequency acoustic waves to the surface of the substrate supported by the holding unit and a second cleaning-fluid injection unit disposed below the holding unit and arranged to inject cleaning fluid to the reverse side of the substrate supported by the holding unit.
Claims3
A cleaning apparatus comprising:
- holding means for horizontally holding a substrate required to be cleaned having a rotation support member;
- rotating means for rotating said holding means having a cylindrical fixed shaft and a drive mechanism for rotating said rotation support member around said fixed shaft;
- first cleaning-fluid injection means disposed below said holding means to zonally inject cleaning fluid with high-frequency acoustic waves to the reverse side of said substrate supported by said holding means;
- and
- second cleaning-fluid injection means disposed above said holding means to inject cleaning fluid to the surface of said substrate supported by said holding means,
- wherein said first cleaning-fluid injection means has a rectangular block secured to the upper end of said cylindrical fixed shaft and having, in the upper surface thereof, a rectangular nozzle hole having an elongated cleaning-fluid discharge port, an oscillator, in said block, disposed adjacent to the bottom portion of said nozzle hole to face said discharge port so as to be connected to a power supply cable introduced through said cylindrical fixed shaft and a cleaning-fluid passage formed in said block so as to be communicated with said nozzle hole and connected to a cleaning-fluid supply pipe introduced through said cylindrical fixed shaft.
Dependencies are inferred from the claim text.