Nozzle and method for extruding conductive paste into high aspect ratio openings
AssigneeInternational Business Corporation
InventorsAlvin Wilbur Buechele, John Thomas Butler
Life of this patent
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Abstract
A nozzle apparatus and method of use for extruding a conductive paste through a stencil or screen onto a substrate are disclosed. The nozzle includes a body and a conformable insert for contacting the screen. The method comprises the steps of obtaining a substrate and a patterned screen, contacting the screen with a nozzle comprising a nozzle body and a conformable nozzle insert, and extruding a paste through the nozzle and screen onto the substrate. The apparatus and method are particularly useful for producing patterned lines from extruded pastes in the manufacture of microelectronic components, and are even more particularly adapted for use in producing patterns in substrates having high aspect ratio openings.
Claims8
A method for producing at least one patterned feature of extruded paste on an essentially planar microelectronic substrate having high aspect ratio vias, said method comprising the steps of:
- (a) obtaining a substrate having high aspect ratio vias characterized by a via depth to via width ratio of greater than about 2;
- (b) contacting the substrate with an essentially planar patterned screen;
- (c) contacting the screen with a nozzle comprising a nozzle body having an inlet, an elongate outlet formed to receive an insert, and an internal passage in communication therewith, and a nozzle insert formed to compliantly and sealably mount to the nozzle body outlet, said insert having a flat surface located adjacent to said outlet for conformably contacting said essentially planar screen, having a second surface joined to and angled away from said flat surface at a position away from said outlet, and having an elongate slit therein for the extrusion of paste, wherein said second surface is angled in the range of about 2 to about 4 degrees away from said flat surface;
- and
- (d) extruding a paste through said nozzle and said screen onto said substrate.
Dependencies are inferred from the claim text.