Turbo molecular pump
AssigneeMitsubishi Heavy Industries, Ltd.
InventorsTomoaki Okamura, Sadayuki Kotoura
Life of this patent
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Abstract
A turbo molecular pump comprising a plurality of moving blades and stationary blades arranged alternately in the axial direction in a pump casing having a gas suction port and exhaust port, a thread groove pump stage disposed on the exhaust side of the moving and stationary blades, and a spacer for fixing the position intervals of the stationary blades, characterized in that a heating apparatus includes a radiating plate is provided in a gas passage of the thread groove pump stage, and the radiating plate is connected to a heating portion located on the outside of the pump by a good heat conductor. The heating apparatus heats the gas in the thread groove pump stage to a temperature above the gas sublimation temperature.
Claims3
A turbo molecular pump comprising a plurality of moving blades and stationary blades arranged alternately in an axial direction in a pump casing having a gas suction port and exhaust port, a thread groove pump stage disposed on an exhaust side of said moving and stationary blades, and a spacer for fixing the position intervals of said stationary blades, characterized in that a radiating plate is provided in a gas passage of said thread groove pump stage, and said radiating plate is connected to a heating portion located on the outside of said pump by a good heat conductor.
A turbo molecular pump according to claim (1), wherein a heat shield plate is provided between the outer periphery of said radiating plate and said spacer.
A turbo molecular pump according to claim (1), wherein a seal member is provided between an outer periphery of said radiating plate and an inner periphery of said casing.
Dependencies are inferred from the claim text.