Intelligent backup power controller

A PCB for initiating shutdown procedures of an operating system of a semiconductor etching or a semiconductor deposition apparatus and switching off backup power from an Uninterruptible Power Supply (UPS) following main AC power failure to the apparatus, said PCB comprising:

• a timer, said timer timing a first predetermined duration in response to a first start timer signal;
• and
• a master controller, said master controller detecting main AC power failure and issuing to said operating system a failure signal indicative of said AC power failure, said master controller issuing said first start timer signal in response to a shutdown compete signal from the operating system and issuing a power off signal to said UPS at the expiration of said first duration, said power off signal terminating provision of backup power by said UPS, said shutdown complete signal being issued by said operating system upon completion of operating system shutdown procedures.

A device for effecting graceful shutdown of a semiconductor etching or a semiconductor deposition apparatus upon the occurrence of a transition from main power to backup power supplied to the apparatus, the apparatus being operated by an operating system, said device comprising:

• monitoring means for detecting the transition;
• interruption means for interrupting operation of said operating system in response to detection of said transition by said monitoring means, said operating system commencing shutdown procedures in response to interruption by said interruption means.