Composition for forming ceramic material and process for producing ceramic material
AssigneeTonen Corporation
InventorsYasuo Shimizu, Hideki Matsuo, Kazuhiro Yamada
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Abstract
Disclosed are a composition for forming a ceramic material useful for smoothly forming a ceramic film at a low temperature on surfaces of solid products such as substrates used in electronic products, plastic films or the like and a process for producing such a ceramic material. The afore-mentioned composition comprises a silazane-based polymer, and at least one ceramic-transformation promoting agent selected from the group consisting of an amine compound, an acid compound and peroxide. Further, the afore-mentioned ceramic material can be produced by bringing a mixture of the silazane-based polymer and the ceramic-transformation promoting agent into contact with steam.
Claims9
A process for producing a SiO.sub.2 -based ceramic material, comprising:
- bringing a silazane-based polymer, said polymer containing Si--N, Si--H and N--H bonds, into contact with a vapor of at least one ceramic-transformation promoting agent selected from the group consisting of an amine compound, an acid compound and a peroxide, and with steam, separately or simultaneously, at a temperature of 20-500.degree. C., to eliminate said bonds and to simultaneously form new Si--O bonds, thereby transforming said polymer into the ceramic material.
A process for producing a SiO.sub.2 -based ceramic film on a surface of a solid body, comprising:
- forming, on the surface of said solid body, a film comprising a silazane-based polymer containing Si--N, N--H and Si--H bonds;
- and
- bringing said film into contact with a vapor of at least one ceramic-transformation promoting agent selected from the group consisting of an amine compound, an acid compound and a peroxide, and steam, separately or simultaneously, at a temperature of 20-500.degree. C., to eliminate said bonds and to simultaneously for new Si--O bonds, thereby transforming said film into the ceramic film.
A process for forming a SiO.sub.2 -based ceramic film on a solid body, comprising:
- (a) applying a coating material comprising a silazane-based polymer on a surface of the solid body to form a film of said coating material thereon, said polymer containing Si--N, Si--H and N--H bonds;
- (b) drying said film of the coating material to form a polymer film on the solid body;
- and
- (c) bringing said polymer film on the solid body into contact with a vapor of at least one ceramic-transformation promoting agent selected from the group consisting of an amine compound, an acid compound and a peroxide, and with steam, separately or simultaneously, at a temperature of 20-500.degree. C., to eliminate said bonds and to simultaneously form new Si-O bonds, thereby transforming the polymer film into the ceramic film.
Dependencies are inferred from the claim text.